Vibrating Membrane Gauge for Wide-Range Pressure Measurement

Project Information

VIMEG

Grant agreement ID: 101158325

DOI

10.3030/101158325

Project closed

EC signature date 25 January 2024

Start date 1 February 2024

End date 31 July 2025

Funded under

• European Research Council (ERC)

Total cost

No data

EU contribution

€ 150 000,00

Coordinated by

KOBENHAVNS UNIVERSITET
Denmark

Periodic Reporting for period 1 - VIMEG (Vibrating Membrane Gauge for Wide-Range Pressure Measurement)

Reporting period: 2024-02-01 to 2025-07-31

Summary of the context and overall objectives of the project

Numerous industrial and scientific processes are conducted under vacuum conditions for improved cleanliness and control. Monitoring the vacuum level is crucial to ensure consistent process results. Ionization gauges represent the state-of-the-art for measuring residual gas pressure at high and ultrahigh vacuum levels. Here we propose to establish an alternative pressure gauge based on measuring the gas friction experienced by a nanomechanical membrane resonator with ultralow intrinsic damping. This approach promises more compact, durable, and accurate gauges that cover a wider pressure range than conventional ionization gauges.

Work performed from the beginning of the project to the end of the period covered by the report and main results achieved so far

We have implemented a test station in which a vibrating membrane can be exposed to gases of varying pressure, from atmosphere to the high vacuum range. The membrane can be excited and its motion detected with an optical interferometer. We could hence measure the membrane resonance modes’ Q-factor as a function of gas pressure. We verified that it follows a robust relation in the molecular flow regime.
We furthermore designed a chip that can be integrated with a phononic membrane for readout of mechanical motion using a capacitive transducer and an electronic measurement circuit. To this end, a membrane resonator was functionalized with a metal electrode. We demonstrated that this method can measure a mechanical ringdown. We confirmed that the Q-factors determined using the optical and electronic approach agreed to within the measurement error.
We have thence developed a rudimentary prototype of an electronically readout membrane friction sensor.

Progress beyond the state of the art and expected potential impact (including the socio-economic impact and the wider societal implications of the project so far)

We have demonstrated measurement of a membrane mechanical ringdown with both electronic and optical means and confirmed good quantitaive agreement. This forms the basis for new sensing technologies, in which the friction acting on the membrane motion is of interest. A scientific publication and a patent application of technical aspects of this method is in preparation. A spin-out that pursues commericialization of the technology has been founded. The spin out is developing a business plan and currently seeks further funding and investment. Collaboration with major industry players is under discussion. Further research will be needed to validate stability and accuracy of such a sensing approach.