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Chip-based Accurate eLectron Intensity Beam Readout for Advanced TEM Experiments

Objective

Accurate electron beam current measurement at the specimen plane is fundamental to quantitative TEM, yet no reliable standard exists across major instrument platforms. Current approaches introduce systematic errors of 18 to 52% or are incompatible with the MEMS-based in situ holders needed for picoampere-level electrical measurements in operando devices. This gap prevents quantitative electron beam-induced current (EBIC) and secondary electron EBIC (SEEBIC) imaging, techniques increasingly critical for nanoscale materials and device characterisation.

CALIBRATE addresses this by developing a calibration approach that makes accurate beam current measurement available directly at the sample position in MEMS-based in situ experiments, across instrument and holder platforms. The target is a measurement error below 5%. This would enable the first quantitative in situ EBIC/SEEBIC experiments and provide a traceable dose-control standard for the broader in situ TEM community.

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Programme(s)

Topic(s)

Funding Scheme

HORIZON-ERC-POC - HORIZON ERC Proof of Concept Grants

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Call for proposal

(opens in new window) ERC-2026-POC

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Host institution

TECHNISCHE UNIVERSITAT DARMSTADT
Net EU contribution
€ 150 000,00
Address
KAROLINENPLATZ 5
64289 Darmstadt
Germany
Region
Hessen Darmstadt Darmstadt, Kreisfreie Stadt
Activity type
Higher or Secondary Education Establishments
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Total cost
No data

Beneficiaries (1)