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Compact ultra-high-Q optomechanical sensors

Objective

Recent advances in high-stress silicon nitride membranes have enabled some of the most sensitive room-temperature force and displacement measurements ever demonstrated. These ultrathin membranes combine exceptional mechanical performance with very low optical absorption, making them one of the strongest platforms for cavity optomechanics and precision sensing. However, despite their extraordinary capabilities, such systems have remained largely confined to specialist laboratories because they typically require delicate cavity assembly, demanding optical alignment, and expert operation.

COMPACT-Q will translate this frontier research into a compact and deployable sensing technology. Building on my ERC-funded work on extreme-aspect-ratio silicon nitride photonic crystal membranes, record-high-Q nanomechanical structures, and monolithically integrated silicon nitride membranes above distributed Bragg reflectors, the project will develop compact high-Q optomechanical sensors based on self-aligned cavity architectures. This removes a major bottleneck in the field by replacing fragile manual cavity construction with a manufacturable integrated platform.

The project will validate the sensing performance of these compact integrated systems, identify the most promising combinations of sensitivity, vacuum packaging, size, and robustness for early applications, and define a clear route toward exploitation. Initial target users include advanced sensor and optomechanics researchers who need validated self-aligned cavity platforms, with longer-term opportunities in inertial sensing, gravimetry, vibration monitoring, and precision instrumentation.

By moving one of the world’s best room-temperature sensing platforms out of the lab and toward practical deployment, COMPACT-Q aims to open a new technology class of compact silicon nitride cavity optomechanical sensors with strong commercial and societal potential.

Fields of science (EuroSciVoc)

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Programme(s)

Multi-annual funding programmes that define the EU’s priorities for research and innovation.

Topic(s)

Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.

Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

HORIZON-ERC-POC - HORIZON ERC Proof of Concept Grants

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Call for proposal

Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.

(opens in new window) ERC-2026-POC

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Host institution

TECHNISCHE UNIVERSITEIT DELFT
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 150 000,00
Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

No data

Beneficiaries (1)