Objective
- To evaluate and demonstrate high availability and throughput, and low cost of ownership of the barrel asher.
- To evaluate substrate surface and gate oxide damage and compare with single wafer ashing systems for different IC process technologies.
- To carry out a final equipment test under full production conditions in the SIEMENS Villach production line.
The performance of the Technics Plasma microwave barrel asher "Plasma-Processor 300-Autoload" is to be assessed in the IC manufacturing line of SIEMENS Bauelemente, Villach. The assessment is to show that the Technics Plasma barrel asher offers the advantages of both barrel (high wafer throughput, low cost of ownership) and single wafer ashing systems (low degree of radiation damage).
Fields of science (EuroSciVoc)
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
9500 Villach
Austria
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.