Objective
- Improve current version of machine by: (a) reducing minimum wavelength to operate in UV for ultra thin oxide/nitride/oxide multilayers, (b) reducing spot size to 100x200 micron to allow measurements in test pads as well as scribe lines, and (c) incorporating alloy composition determination procedure in software.
- Assess accuracy and precision (repeatability) on a wide range of structures by comparison with off-line measurements.
- Assess ability to discriminate changing layer characteristics both within batches and from batch-to-batch, together with throughput and reliability, by extensive trials on selected representative structures from mainstream CMOS technology demonstrators and advanced Bipolar systems.
- Optimize ease-of-use by customization of analysis methodology for representative structures.
This project will assess, in a process environment, the SOPRA Multi-Layer Monitor (MLM) which is an automatic, clean-room compatible, high throughput, optical monitoring instrument based on multi-channel spectroscopic ellipsometry. The machine is capable of measuring, non-destructively, up to five layers simultaneously on patterned product wafers, providing information on thickness, crystallinity, composition, refractive index and roughness, together with uniformity mapping. The outcome of the project will be a machine with an operator-level methodology for important CMOS/Bipolar process steps with quantified capabilities/benefits.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
GU14 6TD Farnborough
United Kingdom
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.