Fast particles and nanoclusters are produced directly in energetic plasmas, with desirable results as in nanopowder production and undesirable results as in debris and fast particle damage in EUV light sources. The phenomena cover diverse disciplines, from plasma physics to atomic physics, from radiation transport to quantum mechanics, from magnetohydrodynamics to non-equilibrium chemistry. Modelling tools and techniques that can describe the complete process, from plasma formation to formation of energetic particles and large nanoclusters, are lacking. The FIRE project aims to bridge this gap through the collective experience and transfer of knowledge between 3 partners, all actively engaged in different aspects of the overall issue. The knowledge and techniques to be transferred between the research institutions and industrial partner will enhance the capability of modelling of discharge and laser produced plasma to study the plasma dynamics, spectral emission and the creation of nanoparticles for the semiconductor industry and in nanotechnology. A state of the art 2-D RMHD code Z* will be upgraded to include recent advances in atomic physics and evolved into a hybrid 3-D code to address key issues in industrial plasmas. In depth research experience in laser produced plasmas and discharge plasmas will be exchanged. Complex radiation understanding in unresolved transition arrays and non-stationary ionization in mutlicharge ions will be combined. Within the FIRE project, the innovative code created will be used to design the EUV sources together with debris mitigation systems for the lithographic industry on one side, and to optimize the plasma-gas interaction for a cost effective, scalable technology for size-controlled nanopowder production on the other. The theoretical work will be backed up by experimental measurements. The developed modelling tool is expected to be applied in other branches of science and technology.
Fields of science
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