Objective
To evaluate the L-Stripper system to obtain:
Photoresist stripping results for the advanced processes of sub-micron technologies.
Cost of ownership figures for reference to other equipment.
Assessment of installation and equipment functionality for future improvements.
Assessment of yield improvement.
Removal of tough compounds which are formed during semiconductor wafer fabrication, is one of the tough challenges in photoresist stripping of sub half micron semiconductor wafers. The L-Stripper, a novel DUV-excimer laser based system, was developed by Oramir Ltd. to solve those demands. The fully automatic equipment comprises an industrial excimer laser, specially designed UV optics and a process chamber where the stripping process is achieved.
The L-Stripper will be evaluated for its capability to achieve perfect dry single step (no post dry strip wet processing) resist and polymer stripping on deep sub-micron 150 mm and 200 mm semiconductor wafers.
Expected results include single step dry photoresist stripping with reduction of cost of ownership (CoO), improved process yield and uptime.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences polymer sciences
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences physical sciences optics laser physics
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
80636 MÜNCHEN
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.