Objective
To develop and evaluate 6"x 6" substrates for 0.35 um processing.
To develop and evaluate 7"x 7" substrates for 0.35 and 0.25 um processing taking into account material resistance to 248 nm excimer laser radiation damage.
To develop equipment and technology for large area substrates (9"x 9"), which includes process steps like melting, squaring, slicing, lapping, polishing and cleaning.
To develop large area substrate material which is resistant to radiation damage at
193 nm exposure wavelength (for 0.18 um technologies and beyond).
At present photomask substrates are produced by Japanese suppliers only, who also dominate the photomask blank market. LAPS aims to establish a European source of substrates and blanks, which meet the requirements of 193 nm excimer laser exposure, 0.18 um technology level, and 300 mm wafer size.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
7745 Jena-Burgau
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.