Evaluation of a surface preparation system for the analysis of silicon wafers

Project Information

SUPRA

Grant agreement ID: 27564

Project closed

Start date 15 May 1998

End date 14 August 1999

Funded under

• Specific research and technological development programme in the field of information technologies, 1994-1998

Total cost € 840 000,00

EU contribution € 374 000,00

Coordinated by

Inter University Microelectronics Center
Belgium

Fields of science

• natural sciences › chemical sciences › inorganic chemistry › metalloids

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.9 - Building blocks, methods & tools for semiconductor app&techs

Call for proposal

Data not available

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

Inter University Microelectronics Center

• EU contribution: No data
• Address: Kapeldreef 75 ; 3001 Leuven ; Belgium
• Total cost: No data