Evaluation of a surface preparation system for the analysis of silicon wafers

Fields of science

• natural sciences › chemical sciences › inorganic chemistry › metalloids

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.9 - Building blocks, methods & tools for semiconductor app&techs

Call for proposal

Data not available

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

Inter University Microelectronics Center

Address

Kapeldreef 75
3001 Leuven
Belgium