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Enable power technologies on 300mm wafer diameter

Objective

EPT 300 aims to be a decisive step forward to strengthen Europe’s leading position in power semiconductor technologies and More-than-Moore manufacturing capabilities relating to energy efficient electronic solutions. Power semiconductor devices fabricated in a European leading pilot line for 300mm wafer production are the scope of the project, for which manufacturing excellence, cost competitiveness and challenging applications are critical boundary conditions.
The project will thus address challenges in the research on process technologies, production technologies and handling and automation for advanced power technologies based on 300mm wafers:
• Wafer substrate materials for 300mm diameter thin wafers for power applications
• New process capabilities and technology approaches
• Enabling of processing equipment with capabilities specially derived from the requirements of manufacturing power devices on thin 300mm wafers
• Handling and automation concepts for thin wafer and special requirements of More-than-Moore fabrication lines
• Coexistence strategies for integrated multi-wafer-diameter manufacturing
• Application requirements for demonstrator application and corresponding quality requirement profiles
With the intended research it is planned to achieve the realization of demonstrators in a pilot line and to demonstrate the readiness for production in large scale production environment based on selected products and technologies. The demonstrator will be verified in a fully functional energy efficient power application. By this project, the base toward future enhancements in power technologies will be made.
With the help of EPT300, the European semiconductor manufacturing and the European equipment & materials industries will be the worldwide first with a 300mm power semiconductor processing line dedicated to power device production. By this, EPT300 will be an important step towards realizing leading edge manufacturing capabilities in Europe.

Call for proposal

ENIAC-2011-2
See other projects for this call

Coordinator

INFINEON TECHNOLOGIES AUSTRIA AG
Address
Siemensstrasse 2
9500 Villach
Austria
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 3 311 454

Participants (22)

INFINEON TECHNOLOGIES DRESDEN GMBH& CO KG
Germany
EU contribution
€ 766 558
Address
Konigsbrucker Strasse 180
01099 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
INFINEON TECHNOLOGIES AG
Germany
EU contribution
€ 183 150
Address
Am Campeon 1-15
85579 Neubiberg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
LAM RESEARCH AG
Austria
EU contribution
€ 153 113
Address
Sez-strasse 1
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASM INTERNATIONAL N.V.
Netherlands
EU contribution
€ 169 732
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ARTESYN AUSTRIA GMBH & CO KG
Austria
EU contribution
€ 114 513
Address
Altmannsdorferstrasse 104
1120 Wien
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
CTR CARINTHIAN TECH RESEARCH AG
Austria
EU contribution
€ 48 006
Address
Hightech Campus Villach Europastrasse 12
9524 Villach Sankt Magdalen
Activity type
Other
Administrative Contact
INFINEON TECHNOLOGIES AUSTRIA AG
Austria
EU contribution
€ 310 159
Address
Siemensstrasse 2
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
UNIVERSITAET KLAGENFURT
Austria
EU contribution
€ 56 954
Address
Universitaetsstrasse 65-67
9020 Klagenfurt
Activity type
Higher or Secondary Education Establishments
Administrative Contact
PHILIPS MEDICAL SYSTEMS NEDERLAND BV
Netherlands
EU contribution
€ 433 032
Address
Veenpluis 6
5684 PC Best
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
MECHATRONIC SYSTEMTECHNIK GMBH
Austria
EU contribution
€ 163 737
Address
Tirolerstrasse 80
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Eutema Technology Management GmbH & Co KG
Austria
EU contribution
€ 54 003
Address
Lindengasse 43/13
1070 Wien
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SICO Technology GmbH
Austria
EU contribution
€ 124 415
Address
Bleiberg-nötsch 176
9531 Bleiberg-kreuth
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SEMIKRON ELEKTRONIK GMBH & CO. KG
Germany
EU contribution
€ 51 703
Address
Sigmundstrasse 200
90431 Nurnberg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
L.P.E. SPA
Italy
EU contribution
€ 258 850
Address
Via Dei Giovi 7
20021 Baranzate Milano
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SILTRONIC AG
Germany
EU contribution
€ 250 120
Address
Einsteinstrasse 172
81677 Munchen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
FABMATICS GMBH
Germany
EU contribution
€ 105 209
Address
Zur Steinhoehe 1
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
TECHNISCHE UNIVERSITAET DRESDEN
Germany
EU contribution
€ 61 300
Address
Helmholtzstrasse 10
01069 Dresden
Activity type
Higher or Secondary Education Establishments
Administrative Contact
ROTH & RAU - ORTNER GMBH
Germany
EU contribution
€ 119 261
Address
Manfred Von Ardenne Ring 7
01099 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands
EU contribution
€ 148 429
Address
Groene Loper 3
5612 AE Eindhoven
Activity type
Higher or Secondary Education Establishments
Administrative Contact
PRODRIVE TECHNOLOGIES BV
Netherlands
EU contribution
€ 81 788
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
HELIOX
France
EU contribution
€ 183 170
Address
Avenue De Clichy 10
75018 Paris
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bruco Integrated Circuits
Netherlands
EU contribution
€ 141 700
Address
Oostermaat 2
7623CS Borne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact