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Circuit Stability Under Process Variability and\n Electro-Thermal-Mechanical Coupling

Project description


Very advanced nanoelectronic components: design, engineering, technology and manufacturability

Among the physical limitations which challenge progress in nanoelectronics for aggressively scaled More Moore, Beyond CMOS and advanced More-than-Moore applications, process variability and the interactions between and with electrical, thermal and mechanical effects are getting more and more critical. Effects from various sources of process variations, both systematic and stochastic, influence each other and lead to variations of the electrical, thermal and mechanical behaviour of devices, interconnects and circuits. Correlations are of key importance because they drastically affect the percentage of products which meet the specifications. Whereas the comprehensive experimental investigation of these effects is largely impossible, modelling and simulation (TCAD) offers the unique possibility to predefine process variations and trace their effects on subsequent process steps and on devices and circuits fabricated, just by changing the corresponding input data. This important requirement for and capability of simulation is among others highlighted in the International Technology Roadmap for Semiconductors ITRS. Within the SUPERTHEME project, the most important weaknesses which limit the use of current TCAD software to study the influence of both systematic and stochastic process variability and its interaction with electro-thermal-mechanical effects will be removed, and the study of correlations will be enabled. The project will efficiently combine the use of commercially available software and leading-edge background results of the consortium with the implementation of the key missing elements and links. It will bridge the current critical gap between variability simulation on process and device/interconnect level, and include the treatment of correlations. The capabilities of the software system will be demonstrated both on advanced analog circuits and on aggressively scaled transistors.

Call for proposal

FP7-ICT-2011-8
See other projects for this call

Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Address
Hansastrasse 27C
80686 Munchen
Germany
Activity type
Research Organisations
Administrative Contact
Andrea Zeumann (Ms.)

Participants (9)

TECHNISCHE UNIVERSITAET WIEN
Austria
Address
Karlsplatz 13
1040 Wien
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Siegfried Selberherr (Prof.)
AMS AG
Austria
Address
Tobelbaderstrasse 30
8141 Unterpremstaetten
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Yasmine Pree (Ms.)
HQ-Dielectrics GmbH
Germany
Address
Dornstadter Weg 9/1
89160 Dornstadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Wilhelm Beckmann
Excico France
France
Address
Quai Des Grésillons
92230 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Karim Huet (Dr.)
ION BEAM SERVICES
France
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
FRANK TORREGROSA (Dr.)
ASML NETHERLANDS B.V.
Netherlands
Address
De Run 6501
5504DR Veldhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Jo Finders (Dr.)
UNIVERSITY OF GLASGOW
United Kingdom
Address
University Avenue
G12 8QQ Glasgow
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Joe Galloway (Mr.)
Gold Standard Simulations ltd
United Kingdom
Address
Mitchell Street 90 Gordon Chambers
G1 3NQ Glasgow
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Lena Neil-Parra (Mrs.)
LASER SYSTEMS & SOLUTIONS OF EUROPE
France
Address
145 Rue Des Caboeufs
92230 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)