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Content archived on 2024-06-16

Reliability of microfabricated actuators

Objective

MicroElectroMechanical Systems, or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micrometer scale equivalents that can be produced in large quantities by silicon micro-machining. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. MEMS improved functionalities and potential capabilities have brought in range many different application fields, including optical communications, medicine, guidance and navigation systems, RF devices, weapons systems, biological and chemical agent detection, and data storage. Because the field of commercial MEMS is still in its infancy, there is nevertheless an important issue for MEMS which still requires advanced research, i.e. MEMS reliability. Reliability is a particular challenge for MEMS because directly influences the acceptance, competitively and reputation of a technology.

Many promising MEMS applications are to be found in safety critical systems and in harsh environments, where the cost of failure might be catastrophic. MEMS technology is evolving rapidly with the introduction of new processes, materials, and structural geometries. This brings many new failure mechanisms, which are poorly understood compared to the well- known failure mechanisms for common integrated circuits. The grand objective of this Project is to develop and apply reliability procedure for micro-actuators during their chip-production and their long-term characterisation by the development of measurement and data analysis procedures, the proposition of novel optical instrumentation in experimental measurement for re liability, the development of hybrid numerical-experimental methodologies to increase the understanding of performance, and to support modelling of failure modes.

Fields of science (EuroSciVoc)

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Keywords

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Topic(s)

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Call for proposal

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FP6-2004-MOBILITY-11
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Funding Scheme

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ERG - Marie Curie actions-European Re-integration Grants

Coordinator

POLITECHNIKA WARSZAWSKA (WARSAW UNIVERSITY OF TECHNOLOGY)
EU contribution
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Address


Poland

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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

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