Objective
MicroElectroMechanical Systems, or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micrometer scale equivalents that can be produced in large quantities by silicon micro-machining. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. MEMS improved functionalities and potential capabilities have brought in range many different application fields, including optical communications, medicine, guidance and navigation systems, RF devices, weapons systems, biological and chemical agent detection, and data storage. Because the field of commercial MEMS is still in its infancy, there is nevertheless an important issue for MEMS which still requires advanced research, i.e. MEMS reliability. Reliability is a particular challenge for MEMS because directly influences the acceptance, competitively and reputation of a technology.
Many promising MEMS applications are to be found in safety critical systems and in harsh environments, where the cost of failure might be catastrophic. MEMS technology is evolving rapidly with the introduction of new processes, materials, and structural geometries. This brings many new failure mechanisms, which are poorly understood compared to the well- known failure mechanisms for common integrated circuits. The grand objective of this Project is to develop and apply reliability procedure for micro-actuators during their chip-production and their long-term characterisation by the development of measurement and data analysis procedures, the proposition of novel optical instrumentation in experimental measurement for re liability, the development of hybrid numerical-experimental methodologies to increase the understanding of performance, and to support modelling of failure modes.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences data science
- social sciences political sciences political transitions revolutions
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences chemical sciences inorganic chemistry metalloids
- social sciences social geography transport navigation systems
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP6-2004-MOBILITY-11
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Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
Poland
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.