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Contenu archivé le 2024-06-16

Reliability of microfabricated actuators

Objectif

MicroElectroMechanical Systems, or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micrometer scale equivalents that can be produced in large quantities by silicon micro-machining. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. MEMS improved functionalities and potential capabilities have brought in range many different application fields, including optical communications, medicine, guidance and navigation systems, RF devices, weapons systems, biological and chemical agent detection, and data storage. Because the field of commercial MEMS is still in its infancy, there is nevertheless an important issue for MEMS which still requires advanced research, i.e. MEMS reliability. Reliability is a particular challenge for MEMS because directly influences the acceptance, competitively and reputation of a technology.

Many promising MEMS applications are to be found in safety critical systems and in harsh environments, where the cost of failure might be catastrophic. MEMS technology is evolving rapidly with the introduction of new processes, materials, and structural geometries. This brings many new failure mechanisms, which are poorly understood compared to the well- known failure mechanisms for common integrated circuits. The grand objective of this Project is to develop and apply reliability procedure for micro-actuators during their chip-production and their long-term characterisation by the development of measurement and data analysis procedures, the proposition of novel optical instrumentation in experimental measurement for re liability, the development of hybrid numerical-experimental methodologies to increase the understanding of performance, and to support modelling of failure modes.

Champ scientifique (EuroSciVoc)

Mots‑clés

Thème(s)

Appel à propositions

FP6-2004-MOBILITY-11
Voir d’autres projets de cet appel

Régime de financement

ERG - Marie Curie actions-European Re-integration Grants

Coordinateur

POLITECHNIKA WARSZAWSKA (WARSAW UNIVERSITY OF TECHNOLOGY)
Contribution de l’UE
Aucune donnée
Adresse


Pologne
Coût total
Aucune donnée