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Emerging Nanopatterning Methods

Objective

The growing importance of nanotechnology for the European Research Area is reflected in theFP6 Thematic Priorities. It is foreseen that most of the projects submitted to the Priority Area 3 (NMP) will need and develop nanopatterning techniques in one way or another. The Emerging Nanopatterning Methods (NaPa) consortium integrates the new patterning methods into one project, both anticipating and responding to the increasing need for technologies, standards and metrology required to harness the new application-relevant properties of engineered structures with nm-scale features. The NaPa consortium complements the deep UV technology by providing low-cost scalable processes and tools to cover the needs of nanopatterning from CMOS back-end processes through photonics to biotechnology. To achieve this, research in three technology strands is proposed: nanoimprint lithography, soft lithography & self-assembly and MEMS-based nanopatterning. While the former is at a crucial embryonic stage, requiring prompt consolidation to yield its first products in one or two years, the other two will result in applications towards the end of the project. Research in three overarching themes required by all strands: Materials, Tools and Simulation will be undertaken. NaPa brings together 35 leading academic and industrial European institutions with a vast amount of recent know-how on nanofabrication, partly developed within FP5. In total, 3500 person months will be contributed by the partners to the project. Complementing R&D, the consortium will design exciting nanoscience and nanoengineering courses to advance the training of the next generation of scientists and engineers and to create a positive attitude towards science among young people. Dissemination activities towards the lay public and sectors underrepresented in nanotechnology form an integral part in NaPa.

Call for proposal

FP6-2002-NMP-1
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Coordinator

VTT VALTION TEKNILLINEN TUTKIMUSKESKUS
Address
Vuorimiehentie 3
Espoo
Finland

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Participants (31)

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Switzerland
Address
Ecublens
Lausanne

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IBM RESEARCH GMBH
Switzerland
Address
Saeumerstrasse 4
Reuschlikon

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CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Rue Michel Ange 3
Paris

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MICRO RESIST TECHNOLOGY GMBH
Germany
Address
Kopernicker Strasse 325, Haus 211
Berlin

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UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORK
Ireland
Address
Western Road
Cork

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SUSS MICROTEC LITHOGRAPHY GMBH
Germany
Address
Schleissheimer Strasse 90
Garching / Munich

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CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A.
Switzerland
Address
Rue Jaquet Droz 1
Neuchatel

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AMO GMBH - GESELLSCHAFT FUER ANGEWANDTE MIKRO- UND OPTOELEKTRONIK MBH
Germany
Address
Huyskensweg 25
Aachen

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FUNDACION CIDETEC - CENTRO DE TECNOLOGICAS ELECTROQUIMICAS
Spain
Address
Paseo Miramon 196
San Sebastian

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CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Spain
Address
Serrano 117
Madrid

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EV GROUP E. THALLNER GMBH
Austria
Address
Di Erich Thallner Strasse 1
Schaerding

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INSTITUTE OF MICROELECTRONICS TECHNOLOGY RAS
Russia
Address
Moscow District
Chernogolovka

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FUNDACION INASMET
Spain
Address
Mikeletegi Pasealekua 2, Teknologi Parkea
San Sebastian

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CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
Address
Piazzale Aldo Moro 7
Roma

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CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
Address
Piazzale Aldo Moro 7
Roma

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COMMISSARIAT A L'ENERGIE ATOMIQUE
France
Address
31-33 Rue De La Federation
Paris

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LINKOEPINGS UNIVERSITET
Sweden
Address
Hus Origo Campus Valla
Linkoeping

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LUNDS UNIVERSITET
Sweden
Address
Paradisgatan 5c
Lund

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UNIVERSITEIT TWENTE
Netherlands
Address
Drienerlolaan 5
Enschede

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DANMARKS TEKNISKE UNIVERSITET
Denmark
Address
Anker Engelundsvej 1, Bygning 101a
Lyngby

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BIOSENSIA LIMITED
Ireland
Address
9 Mardyke Parade
Cork

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NANOPLUS NANOSYSTEMS AND TECHNOLOGIES GMBH
Germany
Address
Oberer Kirschberg 4
Gerbrunn

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NPL MANAGEMENT LIMITED
United Kingdom
Address
Queens Road
Teddington

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OBDUCAT AB
Sweden
Address
Geijersgatan 2a
Malmoe

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PAUL SCHERRER INSTITUT
Switzerland
Address
Na
Villigen Psi

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FUNDACION TEKNIKER
Spain
Address
Avenida Otaola 20
Eibar

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UNIVERSITY OF GLASGOW
United Kingdom
Address
University Avenue
Glasgow

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POLITECHNIKA WARSZAWSKA
Poland
Address
Plac Politechniki 1
Warszawa

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SUSS MICROTEC S.A.S.
France
Address
131 Impasse Barteudet
Saint Jeoire

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SMART EQUIPMENT TECHNOLOGY SAS - S.E.T SAS
France
Address
Impasse Barteudet 131
St Jeoire

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CENTRO RICERCHE FIAT SOCIETÀ CONSORTILE PER AZIONI
Italy
Address
Strada Torino 50
Orbassano (To)

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