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Feasibility study for a 'Flying Wafer' concept to implement a European virtual 300mm RandD-Line

Objective

This project is part of a joint European activity which targets at inter-linking the European RandD Centres of Excellence in micro and nanotechnologies to a virtual 300mm CMOS RandD line. The core partners include industrial 300 mm research sites and pilot lines as well as the major European RandD institutes Fraunhofer, IMEC and LETI. The goal of this project is to enable, on a short term, the co-operation of the European RandD centres by providing a fast and reliable logistic and infrastructure for exchange and transfer mechanism of 300mm wafers between the RandD sites.

Thus, existing 300mm processing capabilities, newly purchased standard 300 mm equipment and highly innovative alpha or beta site tools finally can be interlinked to a full CMOS RandD line. Furthermore, data about the current status and location of wafers and carriers needs to be tracked, monitored and administrated in a joint database and made securely accessible by all partners via the internet. Demonstrating the feasibility of inter-linking the already existing European RandD Centres of Excellence within the framework of this project should cost-effectively enable in fact the availability of a virtual European 300mm CMOS RandD line as early as 2005/2006.

Funding Scheme

SSA - Specific Support Action

Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Address
Hansastrasse 27C
80686 Muenchen
Germany

Participants (9)

COMMISSARIAT A L'ENERGIE ATOMIQUE
France
Address
31-33 Rue De La Federation
75752 Paris Cedex 15
ENTEGRIS EUROPE GMBH
Germany
Address
Am Schafbaum 2
74906 Bad Rappenau
FREESCALE SEMICONDUCTEURS CENTRE DE RECHERCHE CROLLES SAS
France
Address
Avenue Du General Eisenhower
31100 Toulouse
INCAM SOLUTIONS
France
Address
29 Rue De La Tuilerie
38170 Seyssinet Pariset
INFINEON TECHNOLOGIES SC300 GMBH & CO.OHG
Germany
Address
Koenigsbruecker Strasse 180
01099 Dresden
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
Address
Kapeldreef 75
3001 Leuven
ISILTEC INNOVATIVE SILICON TECHNOLOGIES GMBH
Germany
Address
Schottkystrasse 10
91058 Erlangen
PHILIPS SEMICONDUCTORS B.V.
Netherlands
Address
High Tech Campus 60
5656AG Eindhoven
SILTRONIC AG
Germany
Address
Hanns-siedel-platz 4
81737 Muenchen