In the ERC-StG-project CoCooN, we investigate the surface modification of nanoparticles by Atomic Layer Deposition (ALD). To enable this research, a rotary ALD reactor was developed. The number of possible applications for nanoparticles has strongly increased in the last decade. For many applications, such as catalysis, batteries, solid-state lighting, but also drug development and biotech, nanoparticles with different surface properties are necessary. Today, and with the help of the ERC- project CoCooN, ALD has proven to be a reliable method for depositing ultrathin and conformal coatings, even on large quantities of (nano)particles.
We have designed and built a prototype rotary ALD reactor that enables both thermal and plasma-enhanced ALD surface modification of (nano)particles. In PaNaCo, we will push this rotary ALD reactor to a pre-commercial level.
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