Smart MEMs Piezo based energy Harvesting with Integrated Supercapacitor and packaging

Project Information

smart-MEMPHIS

Grant agreement ID: 644378

DOI

10.3030/644378

Project closed

EC signature date 11 December 2014

Start date 15 December 2014

End date 14 December 2018

Funded under

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Total cost

€ 8 222 065,75

EU contribution

€ 8 222 065,75

Coordinated by

SILEX MICROSYSTEMS AB
Sweden

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Deliverables

Websites, patent fillings, videos etc. (1)

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Open the project website for public.

Publications

Conference proceedings (19)

Reliability investigation of production thin-film PZT

Author(s): P. Ågren, N. Svedin, T. Ebefors, T. Schmitz-Kempen, R. Kessels, S. Tiedke
Published in: 2018 PiezoMEMS Workshop, 2018
Publisher: -

Self-oscillating multilevel switched-capacitor DC/DC converter for energy harvesting

Author(s): Martin Nielsen-Lonn, Pavel Angelov, J. Jacob Wikner, Atila Alvandpour
Published in: 2017 IEEE Nordic Circuits and Systems Conference (NORCAS): NORCHIP and International Symposium of System-on-Chip (SoC), 2017, Page(s) 1-5, ISBN 978-1-5386-2844-7
Publisher: IEEE
DOI: 10.1109/NORCHIP.2017.8124977

Ring-oscillator-based timing generator for ultralow-power applications

Author(s): Pavel Angelov, Martin Nielsen-Lonn, Atila Alvandpour
Published in: 2017 IEEE Nordic Circuits and Systems Conference (NORCAS): NORCHIP and International Symposium of System-on-Chip (SoC), 2017, Page(s) 1-4, ISBN 978-1-5386-2844-7
Publisher: IEEE
DOI: 10.1109/NORCHIP.2017.8124969

Zero-crossing detector for a piezoelectric energy harvester

Author(s): Franz Marcus Schuffny, Michel Hayoz, Cheolyong Bae, Ishan Arya, Madhur Gokhale, Annapragada Hema Chandar, Martin Nielsen-Lonn, Pavel Angelov
Published in: 2017 IEEE Nordic Circuits and Systems Conference (NORCAS): NORCHIP and International Symposium of System-on-Chip (SoC), 2017, Page(s) 1-6, ISBN 978-1-5386-2844-7
Publisher: IEEE
DOI: 10.1109/NORCHIP.2017.8124957

Miniaturized Supercapacitors for Smart Systems

Author(s): Qi Li, Volodymyr Kuzmenko, Mohammad Mazharul Haque et al
Published in: 11th Smart Systems Integration Conference 2017: International Conference and Exhibition on Integration Issues of Miniaturized Systems, 2017, ISBN 9781-510844780
Publisher: Mesago Messe Frankfurt GmbH

Nanocomposite materials for miniaturized supercapacitors

Author(s): Qi Li, Volodymyr Kuzmenko, Mohammad Mazharul Haque et al
Published in: 11th Smart Systems Integration Conference 2017: International Conference and Exhibition on Integration Issues of Miniaturized Systems, 2017, ISBN 978-3957-35057-2
Publisher: Mesago Messe Frankfurt GmbH

Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams

Author(s): Pontus Johannisson, Fredrik Ohlsson and Cristina Rusu
Published in: ournal of Physics: Conference Series, Volume 773, conference 1, 2016
Publisher: -

Linearization of synthesizable VCO-based ADCs using delta modulation

Author(s): Vishnu Unnikrishnan, Mark Vesterbacka
Published in: 2015 European Conference on Circuit Theory and Design (ECCTD), 2015, Page(s) 1-4, ISBN 978-1-4799-9877-7
Publisher: IEEE
DOI: 10.1109/ECCTD.2015.7300003

A NAND gate based standard cell VCO for use in synthesizable ADCs

Author(s): Vishnu Unnikrishnan, Mark Vesterbacka
Published in: 2015 Nordic Circuits and Systems Conference (NORCAS): NORCHIP & International Symposium on System-on-Chip (SoC), 2015, Page(s) 1-4, ISBN 978-1-4673-6576-5
Publisher: IEEE
DOI: 10.1109/NORCHIP.2015.7364398

A fully synthesized all-digital VCO-based analog-to-digital converter

Author(s): Vishnu Unnikrishnan, Srinivasa Rao Pathapati, Mark Vesterbacka
Published in: 2015 Nordic Circuits and Systems Conference (NORCAS): NORCHIP & International Symposium on System-on-Chip (SoC), 2015, Page(s) 1-4, ISBN 978-1-4673-6576-5
Publisher: IEEE
DOI: 10.1109/NORCHIP.2015.7364386

An ultra-low-voltage OTA in 28 nm UTBB FDSOI CMOS using forward body bias

Author(s): Prakash Harikumar, J Jacob Wikner, Atila Alvandpour
Published in: 2015 Nordic Circuits and Systems Conference (NORCAS): NORCHIP & International Symposium on System-on-Chip (SoC), 2015, Page(s) 1-4, ISBN 978-1-4673-6576-5
Publisher: IEEE
DOI: 10.1109/NORCHIP.2015.7364416

Modelling squeeze film damping in packaged energy harvesters

Author(s): Fredrik Ohlsson, Erik Svensson, Cristina Rusu
Published in: 2015 European Conference on Circuit Theory and Design (ECCTD), 2015, Page(s) 1-4, ISBN 978-1-4799-9877-7
Publisher: IEEE
DOI: 10.1109/ECCTD.2015.7300115

From fan-out wafer to fan-out panel level packaging

Author(s): T. Braun, K.-F. Becker, S. Raatz, V. Bader, J. Bauer, R. Aschenbrenner, S. Voges, T. Thomas, R. Kahle, K.-D. Lang
Published in: 2015 European Conference on Circuit Theory and Design (ECCTD), 2015, Page(s) 1-4, ISBN 978-1-4799-9877-7
Publisher: IEEE
DOI: 10.1109/ECCTD.2015.7300046

A fully-differential OTA in 28 nm UTBB FDSOI CMOS for PGA applications

Author(s): Prakash Harikumar, J Jacob Wikner, Atila Alvandpour
Published in: 2015 European Conference on Circuit Theory and Design (ECCTD), 2015, Page(s) 1-4, ISBN 978-1-4799-9877-7
Publisher: IEEE
DOI: 10.1109/ecctd.2015.7300114

Characterization of a thin piezoelectric material before integration into a cantilever-based mechanical energy harvester

Author(s): T. Hoang, G. Ferin, B. Rosinski, C. Bantignies, H. Le Khanh, A. Nguyen-Dinh, G. Poulin-Vittrant, F. Levassort, and M. Bavencoffe
Published in: 2016 IEEE International Ultrasonics Symposium (IUS), 2016
Publisher: 2016 IEEE International Ultrasonics Symposium (IUS)

MEMS meander harvester with tungsten proof-mass

Author(s): E Kohler, P Johannisson, D Kolev, F Ohlsson, P Agren, J Liljeholm, P Enoksson and C Rusu
Published in: Power MEMS 2018, 2018
Publisher: Power MEMS 2018

Design of a gain-stage for pipelined SAR ADC using capacitive charge pump

Author(s): Kairang Chen, Atila Alvandpour
Published in: 2016 MIXDES - 23rd International Conference Mixed Design of Integrated Circuits and Systems, 2016, Page(s) 187-190, ISBN 978-83-63578-09-1
Publisher: IEEE
DOI: 10.1109/mixdes.2016.7529729

Design of efficient CMOS rectifiers for integrated piezo-MEMS energy-harvesting power management systems

Author(s): Martin Nielsen-Lonn, Prakash Harikumar, J Jacob Wikner, Atila Alvandpour
Published in: 2015 European Conference on Circuit Theory and Design (ECCTD), 2015, Page(s) 1-4, ISBN 978-1-4799-9877-7
Publisher: IEEE
DOI: 10.1109/ECCTD.2015.7300010

Smart autonomous wireless acoustic sensors for aeronautical SHM applications

Author(s): Guillaume Ferin, Yuvashankar Muralidharan, Naoufal Mesbah, Pascal Chatain, Claire Bantignies, Hung Le Khanh, Etienne Flesch, An Nguyen-Dinh
Published in: 2015 IEEE International Ultrasonics Symposium (IUS), 2015, Page(s) 1-4, ISBN 978-1-4799-8182-3
Publisher: IEEE
DOI: 10.1109/ULTSYM.2015.0250

Peer reviewed articles (20)

Ionic liquid electrolyte for supercapacitor with high temperature compatibility

Author(s): Mazharul Haque, Qi Li, Volodymyr Kuzmenko, Anderson D. Smith, Peter Enoksson
Published in: Journal of Physics: Conference Series, Issue 922, 2017, Page(s) 012011, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/922/1/012011

Graphite paper / carbon nanotube composite: a potential supercapacitor electrode for powering microsystem technology

Author(s): Qi Li, Anderson D. Smith, Mazharul Haque, Agin Vyas, Volodymyr Kuzmenko, Per Lundgren, Peter Enoksson
Published in: Journal of Physics: Conference Series, Issue 922, 2017, Page(s) 012014, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/922/1/012014

Impact-driven up-conversion in piezoelectric MEMS energy harvesters with pulsed excitation

Author(s): Pontus Johannisson, Fredrik Ohlsson, Cristina Rusu
Published in: Journal of Physics: Conference Series, Issue 1052, 2018, Page(s) 012106, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/1052/1/012106

Simple method for quality factor estimation in resonating MEMS structures

Author(s): S Larsson, P Johannisson, D Kolev, F Ohlsson, S Nik, J Liljeholm, T Ebefors, C Rusu
Published in: Journal of Physics: Conference Series, Issue 1052, 2018, Page(s) 012100, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/1052/1/012100

Shape effects in doubly clamped bridge structures at large deflections

Author(s): Fredrik Ohlsson, Pontus Johannisson, Cristina Rusu
Published in: Journal of Physics: Conference Series, Issue 1052, 2018, Page(s) 012109, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/1052/1/012109

Verification of Self-Tuning 4DOF Piezoelectric Energy Harvester with Enhanced Bandwidth

Author(s): L.G.H Staaf, E. Köhler, A. D. Smith, P.D Folkow, P. Enoksson
Published in: Journal of Physics: Conference Series, Issue 1052, 2018, Page(s) 012095, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/1052/1/012095

Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT

Author(s): A D Smith, Q Li, A Anderson, A Vyas, V Kuzmenko, M Haque, L G H Staaf, P Lundgren, P Enoksson
Published in: Journal of Physics: Conference Series, Issue 1052, 2018, Page(s) 012143, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/1052/1/012143

Cellulose-derived carbon nanofibers/graphene composite electrodes for powerful compact supercapacitors

Author(s): Volodymyr Kuzmenko, Nan Wang, Mazharul Haque, Olga Naboka, Mattias Flygare, Krister Svensson, Paul Gatenholm, Johan Liu, Peter Enoksson
Published in: RSC Adv., Issue 7/73, 2017, Page(s) 45968-45977, ISSN 2046-2069
Publisher: Royal Society of Chemistry
DOI: 10.1039/c7ra07533b

Coin-cell Supercapacitors Based on CVD Grown and Vertically Aligned Carbon Nanofibers (VACNFs)

Author(s): Amin M. Saleem
Published in: International Journal of Electrochemical Science, 2017, Page(s) 6653-6661, ISSN 1452-3981
Publisher: Electrochemical Science Group, University of Belgrade
DOI: 10.20964/2017.07.46

Redox enhanced energy storage in an aqueous high-voltage electrochemical capacitor with a potassium bromide electrolyte

Author(s): Qi Li, Mazharul Haque, Volodymyr Kuzmenko, Namrata Ramani, Per Lundgren, Anderson D. Smith, Peter Enoksson
Published in: Journal of Power Sources, Issue 348, 2017, Page(s) 219-228, ISSN 0378-7753
Publisher: Elsevier BV
DOI: 10.1016/j.jpowsour.2017.02.082

A pipelined SAR ADC with gain-stage based on capacitive charge pump

Author(s): Kairang Chen, Atila Alvandpour
Published in: Analog Integrated Circuits and Signal Processing, Issue 90/1, 2017, Page(s) 43-53, ISSN 0925-1030
Publisher: Kluwer Academic Publishers
DOI: 10.1007/s10470-016-0872-4

A 0.4-V Subnanowatt 8-Bit 1-kS/s SAR ADC in 65-nm CMOS for Wireless Sensor Applications

Author(s): Prakash Harikumar, J. Jacob Wikner, Atila Alvandpour
Published in: IEEE Transactions on Circuits and Systems II: Express Briefs, Issue 63/8, 2016, Page(s) 743-747, ISSN 1549-7747
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/TCSII.2016.2531099

A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

Author(s): Agin Vyas, Henrik Staaf, Cristina Rusu, Thorbjörn Ebefors, Jessica Liljeholm, Anderson Smith, Per Lundgren, Peter Enoksson
Published in: Micromachines, Issue 9/5, 2018, Page(s) 252, ISSN 2072-666X
Publisher: Multidisciplinary Digital Publishing Institute (MDPI)
DOI: 10.3390/mi9050252

Parametric study of a thin piezoelectric cantilever for energy harvesting applications

Author(s): T. Hoang, G. Poulin-Vittrant, G. Ferin, F. Levassort, C. Bantignies, A. Nguyen-Dinh & M. Bavencoffe
Published in: Advances in Applied Ceramics, 2017
Publisher: -

Compact and low loss electrochemical capacitors using a graphite / carbon nanotube hybrid material for miniaturized systems

Author(s): Qi Li, Shuangxi Sun, Anderson D. Smith, Per Lundgren, Yifeng Fu, Peng Su, Tao Xu, Lilei Ye, Litao Sun, Johan Liu, Peter Enoksson
Published in: Journal of Power Sources, Issue 412, 2019, Page(s) 374-383, ISSN 0378-7753
Publisher: Elsevier BV
DOI: 10.1016/j.jpowsour.2018.11.052

Thermal influence on the electrochemical behavior of a supercapacitor containing an ionic liquid electrolyte

Author(s): Mazharul Haque, Qi Li, Anderson D. Smith, Volodymyr Kuzmenko, Elof Köhler, Per Lundgren, Peter Enoksson
Published in: Electrochimica Acta, Issue 263, 2018, Page(s) 249-260, ISSN 0013-4686
Publisher: Pergamon Press Ltd.
DOI: 10.1016/j.electacta.2018.01.029

A 12.5-ENOB 10-kS/s Redundant SAR ADC in 65-nm CMOS

Author(s): Dai Zhang, Atila Alvandpour
Published in: IEEE Transactions on Circuits and Systems II: Express Briefs, Issue 63/3, 2016, Page(s) 244-248, ISSN 1549-7747
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/tcsii.2015.2482618

Design of a 12.8 ENOB, 1 kS/s pipelined SAR ADC in 0.35-μm CMOS

Author(s): Kairang Chen, Prakash Harikumar, Atila Alvandpour
Published in: Analog Integrated Circuits and Signal Processing, Issue 86/1, 2016, Page(s) 87-98, ISSN 0925-1030
Publisher: Kluwer Academic Publishers
DOI: 10.1007/s10470-015-0648-2

Sustainable carbon nanofibers/nanotubes composites from cellulose as electrodes for supercapacitors

Author(s): Volodymyr Kuzmenko, Olga Naboka, Mazharul Haque, Henrik Staaf, Gert Göransson, Paul Gatenholm, Peter Enoksson
Published in: Energy, Issue 90, 2015, Page(s) 1490-1496, ISSN 0360-5442
Publisher: Pergamon Press Ltd.
DOI: 10.1016/j.energy.2015.06.102

Hierarchical cellulose-derived carbon nanocomposites for electrostatic energy storage

Author(s): V Kuzmenko, A M Saleem, A Bhaskar, H Staaf, V Desmaris, P Enoksson
Published in: Journal of Physics: Conference Series, Issue 660, 2015, Page(s) 012062, ISSN 1742-6588
Publisher: Institute of Physics
DOI: 10.1088/1742-6596/660/1/012062

Thesis and dissertations (4)

Highly-Efficient Energy Harvesting Interfaces for Implantable Biosensors

Author(s): Katic Janko
Published in: KTH Royal Institute of Technology, 2017. , 84 p., 2017, ISBN 978-91-7729-370-5
Publisher: KTH Royal Institute of Technology

Electrochemical Capacitors for Miniaturized Self-powered Systems

Author(s): Li, Qi
Published in: Chalmers University Technical Report MC2-403, Issue 1, 2018, ISSN 1652-0769
Publisher: Chalmers University of Technology

Energy Harvesting and Energy Storage for Wireless and Less-Wired Sensors in Harsh Environment

Author(s): Elof Köhler
Published in: Chalmers University Technical Report, 2018
Publisher: Chalmers University of Technology

Conjoined piezoelectric harvesters and carbon supercapacitors for powering intelligent wireless sensors

Author(s): Henrik Staaf
Published in: PhD Defense, 2018
Publisher: -

Intellectual Property Rights

Patent (3)

LEADLESS CAPSULE TYPE AUTONOMOUS CARDIAC IMPLANT COMPRISING AN ENERGY RECOVERY PROVIDING INFORMATION ON THE PHYSIOLOGY OR ACTIVITY OF THE PATIENT

Application/Publication number: FR 20170055938
Date: 2017-06-28
Applicant(s): CAIRDAC

PIEZOELECTRIC ENERGY HARVESTER SYSTEM WITH COMPOSITE SHIM

Application/Publication number: US 2017257040
Date: 2017-02-27
Applicant(s): VERMON SA

PIEZOELECTRIC ENERGY HARVESTING BENDING STRUCTURE AND THE METHOD OF MANUFACTURING THEREOF

Application/Publication number: US 201762528886
Date: 2017-07-05
Applicant(s): VERMON SA