Objective
A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.
Fields of science
- engineering and technologymechanical engineeringmanufacturing engineering
- natural sciencescomputer and information sciencessoftware
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorsoptical sensors
- natural sciencesphysical sciencesopticsmicroscopy
Programme(s)
Funding Scheme
SME-1 - SME instrument phase 1Coordinator
5633AD Eindhoven
Netherlands
The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.