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In-Line Areal Surface Measurement for Micro and Nano Production

Objective

A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.

Field of science

  • /social sciences/economics and business/business and management/commerce

Call for proposal

H2020-SMEINST-1-2014
See other projects for this call

Funding Scheme

SME-1 - SME instrument phase 1

Coordinator

IBS PRECISION ENGINEERING BV
Address
Esp 201
5633AD Eindhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 50 000