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Structure-based subwavelength imaging

Periodic Reporting for period 1 - SBSI (Structure-based subwavelength imaging)

Reporting period: 2015-11-01 to 2017-04-30

Our PoC project proposed to explore the possibility of making progress in two specific applications of super-resolution imaging, towards potential commercialization. The first was enhancing the resolution if scanning electron microscopy (SEM). This goal was accomplished in full: we have demonstrated that we can enhance the resolution of SEM specifically for the inspection process of microelectronic chips. The results were published in the journal Nano Letters (appeared online August 2017, Tsiper et al.). The resolution enhancement demonstrated there is by a relatively large factor. This part of the project is now at the stage of “beta testing”, being tested online by a large inspection company, which is now also considering the options for either licensing or partnership with the university (on this specific applications). The second application has to do with enhancing the resolution of deep subwavelength florescence microscopy, specifically for biological data. On this application more research is required. We are now writing the first papers, but we are not yet at the stage we can establish a reliable route for commercialization.
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