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Control of Triboelectricity from Micro to Macro as a Principle of Sticking, Particulate Contamination and ESD Prevention of Micromachines

Periodic Reporting for period 1 - Tribocharge (Control of Triboelectricity from Micro to Macro as a Principle ofSticking, Particulate Contamination and ESD Prevention of Micromachines)

Reporting period: 2016-03-01 to 2018-02-28

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