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Pilot line for micro-transfer-printing of functional components on wafer level

Objective

The “Pilot Line for Micro-Transfer-Printing of Functional Components on Wafer Level” project (MICROPRINCE) is focused on creation of a pilot line for heterogeneous integration of smart systems by micro-transfer-printing (µTP) in a semiconductor foundry manufacturing environment. Functional components like processed III/V devices, optical filters, and special sensors will be transfer printed to demonstrate the capabilities of the technology and pilot line. Based on several EU and national research activities demonstrating successfully the feasibility of µTP technology in a scientific and laboratory environment, the MICROPRINCE consortium has the goal to setup the first worldwide open access foundry pilot line for heterogeneous integration by µTP and to demonstrate its capability on five defined target application scenarios. For this purpose, the consortium consisting of 13 partners from four different countries combine their expertise along the value chain from materials and equipment, technology and semiconductor processing, integrated circuit and system design, test and application. The partners are industrial companies incl. SME’s, accompanied by leading research institutes with a clear focus on production and application in Europe. The working principle of the micro-transfer-printing technology is to use a micro-structured elastomer stamp to transfer microscale functional components from their native substrates onto non-native substrates. The lateral dimensions of the functional components can range from a few microns to a few hundreds of microns with thicknesses of only a few microns. The native substrate contains the functional components to be printed and is flexible in size and material. The MICROPRINCE pilot line is acting as a regional and nationwide competence cluster for a novel technology with European dimensions for heterogeneous system integration and supports the ECS industry to reach leadership in key applications.

Coordinator

X-FAB MEMS FOUNDRY GmbH
Net EU contribution
€ 419 925,00
Address
Haarbergstrasse 67
99097 Erfurt
Germany

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Region
Thüringen Thüringen Erfurt, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 1 679 700,00

Participants (13)

X-FAB SEMICONDUCTOR FOUNDRIES GMBH
Germany
Net EU contribution
€ 211 900,00
Address
Haarbergstrasse 67
99097 Erfurt

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Region
Thüringen Thüringen Erfurt, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 847 600,00
MELEXIS TECHNOLOGIES
Belgium
Net EU contribution
€ 86 162,50
Address
Transportstraat 1
3980 Tessenderlo

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Region
Vlaams Gewest Prov. Limburg (BE) Arr. Hasselt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 344 650,00
MELEXIS TECHNOLOGIES SA
Switzerland
Net EU contribution
€ 0,00
Address
Chemin De Buchaux 38
2022 Bevaix

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Region
Schweiz/Suisse/Svizzera Espace Mittelland Neuchâtel
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 460 000,00
MELEXIS
Belgium
Net EU contribution
€ 38 787,50
Address
Rozendaalstraat 12
8900 Ieper

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Region
Vlaams Gewest Prov. West-Vlaanderen Arr. Ieper
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 155 150,00
MELEXIS GMBH
Germany
Net EU contribution
€ 312 375,00
Address
Konrad-zuse-strasse 15
99099 Erfurt

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Region
Thüringen Thüringen Erfurt, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 1 249 500,00
X DISPLAY COMPANY TECHNOLOGY LIMITED

Participation ended

Ireland
Net EU contribution
€ 0,00
Address
6th Floor, 2 Grand Canal Square
2 Dublin

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Region
Ireland Northern and Western Border
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 0,00
HUAWEI TECHNOLOGIES RESEARCH & DEVELOPMENT BELGIUM

Participation ended

Belgium
Net EU contribution
€ 176 344,99
Address
Technologiepark-zwijnaarde 19 Aa Tower
9052 Gent

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Region
Vlaams Gewest Prov. Oost-Vlaanderen Arr. Gent
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 705 379,96
OPTICS BALZERS JENA GMBH
Germany
Net EU contribution
€ 97 599,69
Address
Otto-eppenstein-strasse 2
07745 Jena

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Thüringen Thüringen Jena, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 292 799,06
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
Net EU contribution
€ 262 407,62
Address
Hansastrasse 27c
80686 Munchen

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Region
Bayern Oberbayern München, Kreisfreie Stadt
Activity type
Research Organisations
Non-EU contribution
€ 487 328,43
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 504 867,56
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Non-EU contribution
€ 937 611,19
UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK
Ireland
Net EU contribution
€ 173 125,40
Address
Western Road
T12 YN60 Cork

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Region
Ireland Eastern and Midland Dublin
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 321 518,59
TECHNISCHE UNIVERSITAET DRESDEN
Germany
Net EU contribution
€ 263 946,81
Address
Helmholtzstrasse 10
01069 Dresden

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Region
Sachsen Dresden Dresden, Kreisfreie Stadt
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 490 186,94
X-CELEPRINT LIMITED
Ireland
Net EU contribution
€ 67 175,94
Address
6th Floor 2 Grand Canal Square
D02 A342 Dublin

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Region
Ireland Eastern and Midland Dublin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 268 703,76