Laser-driven plasma sources of extreme ultraviolet light for nanolithography

Project Information

EUVPLASMA

Grant agreement ID: 802648

DOI 10.3030/802648

Project closed

EC signature date 7 September 2018

Start date 1 February 2019

End date 31 January 2024

Funded under

• EXCELLENT SCIENCE - European Research Council (ERC)

Total cost € 1 500 000,00

EU contribution € 1 500 000,00

Coordinated by

STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN
Netherlands

Publications

Peer reviewed articles (27)

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Author(s): O.O. Versolato, J. Sheil, S. Witte, W.M.G. Ubachs and R. Hoekstra
Published in: J. Opt., 2022, ISSN 2040-8978
Publisher: Institute of Physics Publishing
DOI: 10.1088/2040-8986/ac5a7e

Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Author(s): Y. Mostafa, Z. Bouza, J. Byers, I. Babenko, W.M.G. Ubachs, O.O. Versolato and M. Bayraktar
Published in: Opt. Lett., 2023, ISSN 0146-9592
Publisher: Optical Society of America
DOI: 10.1364/ol.496995

Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources

Author(s): D.J. Hemminga, O.O. Versolato and J. Sheil
Published in: Phys. Plasmas, 2023, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0125936

Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma

Author(s): L. Poirier, A. Bayerle, A. Lassise, F. Torretti, R. Schupp, L. Behnke, Y. Mostafa, W.M.G. Ubachs, O.O. Versolato and R. Hoekstra
Published in: Appl. Phys. B, 2022, ISSN 0946-2171
Publisher: Springer Verlag
DOI: 10.1007/s00340-022-07767-1

EUV spectroscopy of highly charged Sn 13 + − Sn

Author(s): J. Scheers, C. Shah, A. Ryabtsev, H. Bekker, F. Torretti, J. Sheil, D. A. Czapski, J. C. Berengut, W. Ubachs, J. R. Crespo López-Urrutia, R. Hoekstra, O. O. Versolato
Published in: Physical Review A, Issue 101/6, 2020, ISSN 2469-9926
Publisher: APS
DOI: 10.1103/physreva.101.062511

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Author(s): L. Poirier, A. Lassise, Y. Mostafa, L. Behnke, N. Braaksma, L. Assink, R. Hoekstra and O.O. Versolato
Published in: Appl. Phys. B, 2022, ISSN 0946-2171
Publisher: Springer Verlag
DOI: 10.1007/s00340-022-07844-5

Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma

Author(s): L. Poirier, D.J. Hemminga, A. Lassise, L. Assink, R. Hoekstra, J. Sheil and O.O. Versolato
Published in: Phys. Plasmas, 2022, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0129112

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

Author(s): S. Rai, K. Bijlsma, L. Poirier, E. de Wit, L. Assink, A. Lassise, I. Rabadán, L. Méndez, J. Sheil, O.O. Versolato and R. Hoekstra
Published in: Plasma Sources Science and Technology, 2023, ISSN 0963-0252
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6595/acc274

High-energy ions from Nd:YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model

Author(s): D.J. Hemminga, L. Poirier, M.M. Basko, R. Hoekstra, W.M.G. Ubachs, O.O. Versolato and J. Sheil
Published in: Plasma Sources Science and Technology, 2021, ISSN 0963-0252
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6595/ac2224

EUV spectroscopy of Sn 5 + –Sn 10 + ions in an electron beam ion trap and laser-produced plasmas

Author(s): Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, M Bayraktar, J R Crespo López-Urrutia, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics B: Atomic, Molecular and Optical Physics, Issue 53/19, 2020, Page(s) 195001, ISSN 0953-4075
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6455/aba3a8

High-energy parametric oscillator and amplifier pulsed light source at 2-μm

Author(s): L. Behnke, E.J. Salumbides, G. Göritz, Y. Mostafa, D.J. Engels, W.M.G. Ubachs and O.O. Versolato
Published in: Opt. Express, 2023, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/oe.494082

Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma

Author(s): J. Hernandez-Rueda, B. Liu, D.J. Hemminga, Y. Mostafa, R.A. Meijer, D. Kurilovich, M.M. Basko, H. Gelderblom, J. Sheil and O.O. Versolato
Published in: Phys. Rev. Res., 2022, ISSN 2643-1564
Publisher: APS
DOI: 10.1103/physrevresearch.4.013142

Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma

Author(s): J. Scheers, R. Schupp, R. Meijer, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review E, Issue 102/1, 2020, ISSN 2470-0045
Publisher: APS
DOI: 10.1103/physreve.102.013204

Laser-induced vaporization of a stretching sheet of liquid tin

Author(s): Bo Liu, Randy A. Meijer, Javier Hernandez-Rueda, Dmitry Kurilovich, Zeudi Mazzotta, Stefan Witte, Oscar O. Versolato
Published in: Journal of Applied Physics, Issue 129/5, 2021, Page(s) 053302, ISSN 0021-8979
Publisher: American Institute of Physics
DOI: 10.1063/5.0036352

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Author(s): R. Schupp, F. Torretti, R. A. Meijer, M. Bayraktar, J. Sheil, J. Scheers, D. Kurilovich, A. Bayerle, A. A. Schafgans, M. Purvis, K. S. E. Eikema, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Applied Physics Letters, Issue 115/12, 2019, Page(s) 124101, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/1.5117504

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

Author(s): L. Behnke, R. Schupp, Z. Bouza, M. Bayraktar, Z. Mazzotta, R. Meijer, J. Sheil, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Optics Express, Issue 29/3, 2021, Page(s) 4475, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/oe.411539

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Author(s): F. Torretti, J. Sheil, R. Schupp, M. M. Basko, M. Bayraktar, R. A. Meijer, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato, A. J. Neukirch, J. Colgan
Published in: Nature Communications, Issue 11/1, 2020, ISSN 2041-1723
Publisher: Nature Publishing Group
DOI: 10.1038/s41467-020-15678-y

Spectral characterization of an industrial EUV light source for nanolithography

Author(s): F Torretti, F Liu, M Bayraktar, J Scheers, Z Bouza, W Ubachs, R Hoekstra, O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 53/5, 2020, Page(s) 055204, ISSN 0022-3727
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6463/ab56d4

Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

Author(s): Oscar O Versolato
Published in: Plasma Sources Science and Technology, Issue 28/8, 2019, Page(s) 083001, ISSN 1361-6595
Publisher: IOPScience
DOI: 10.1088/1361-6595/ab3302

Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma

Author(s): Y. Mostafa, L. Behnke, D.J. Engels, Z. Bouza, J. Sheil, W.M.G. Ubachs and O.O. Versolato
Published in: Appl. Phys. Lett., 2023, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/5.0174149

Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin

Author(s): Bo Liu, Dmitry Kurilovich, Hanneke Gelderblom, Oscar O. Versolato
Published in: Physical Review Applied, Issue 13/2, 2020, ISSN 2331-7019
Publisher: APS
DOI: 10.1103/physrevapplied.13.024035

Dependence of ion charge-energy emission from Nd:YAG-laser-produced plasma on laser intensity in the 0.4–40×10^10 W/cm2 range

Author(s): L. Poirier, A. Lassise, R. Hoekstra, J. Sheil and O.O. Versolato
Published in: Phys. Plasmas, 2023, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0150883

The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range

Author(s): Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W.M.G. Ubachs, R. Hoekstra, M. Bayraktar and O.O. Versolato
Published in: AIP Advances, 2021, ISSN 2158-3226
Publisher: American Institute of Physics Inc.
DOI: 10.1063/5.0073839

Mass partitioning in fragmenting tin sheets

Author(s): B. Liu, R.A. Meijer, W. Li, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato
Published in: Phys. Rev. Appl., 2023, ISSN 2331-7019
Publisher: APS
DOI: 10.1103/physrevapplied.20.014048

Characterization of 1- and 2 − μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Author(s): R. Schupp, L. Behnke, J. Sheil, Z. Bouza, M. Bayraktar, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review Research, Issue 3/1, 2021, ISSN 2643-1564
Publisher: APS
DOI: 10.1103/physrevresearch.3.013294

Speed of fragments ejected by an expanding liquid tin sheet

Author(s): B. Liu, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato
Published in: Phys. Rev. Fluids, 2022, ISSN 2469-990X
Publisher: APS
DOI: 10.1103/physrevfluids.7.083601

Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets

Author(s): R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, J Sheil, M Bayraktar, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 54/36, 2021, Page(s) 365103, ISSN 0022-3727
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6463/ac0b70