Laser-driven plasma sources of extreme ultraviolet light for nanolithography

Project Information

EUVPLASMA

Grant agreement ID: 802648

DOI 10.3030/802648

Project closed

EC signature date 7 September 2018

Start date 1 February 2019

End date 31 January 2024

Funded under

• EXCELLENT SCIENCE - European Research Council (ERC)

Total cost € 1 500 000,00

EU contribution € 1 500 000,00

Coordinated by

STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN
Netherlands

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Peer reviewed articles (27)

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Author(s): O.O. Versolato, J. Sheil, S. Witte, W.M.G. Ubachs and R. Hoekstra
Published in: J. Opt., 2022, ISSN 2040-8978
Publisher: Institute of Physics Publishing
DOI: 10.1088/2040-8986/ac5a7e

Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Author(s): Y. Mostafa, Z. Bouza, J. Byers, I. Babenko, W.M.G. Ubachs, O.O. Versolato and M. Bayraktar
Published in: Opt. Lett., 2023, ISSN 0146-9592
Publisher: Optical Society of America
DOI: 10.1364/ol.496995

Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources

Author(s): D.J. Hemminga, O.O. Versolato and J. Sheil
Published in: Phys. Plasmas, 2023, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0125936

Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma

Author(s): L. Poirier, A. Bayerle, A. Lassise, F. Torretti, R. Schupp, L. Behnke, Y. Mostafa, W.M.G. Ubachs, O.O. Versolato and R. Hoekstra
Published in: Appl. Phys. B, 2022, ISSN 0946-2171
Publisher: Springer Verlag
DOI: 10.1007/s00340-022-07767-1

EUV spectroscopy of highly charged Sn 13 + − Sn

Author(s): J. Scheers, C. Shah, A. Ryabtsev, H. Bekker, F. Torretti, J. Sheil, D. A. Czapski, J. C. Berengut, W. Ubachs, J. R. Crespo López-Urrutia, R. Hoekstra, O. O. Versolato
Published in: Physical Review A, Issue 101/6, 2020, ISSN 2469-9926
Publisher: APS
DOI: 10.1103/physreva.101.062511

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Author(s): L. Poirier, A. Lassise, Y. Mostafa, L. Behnke, N. Braaksma, L. Assink, R. Hoekstra and O.O. Versolato
Published in: Appl. Phys. B, 2022, ISSN 0946-2171
Publisher: Springer Verlag
DOI: 10.1007/s00340-022-07844-5

Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma

Author(s): L. Poirier, D.J. Hemminga, A. Lassise, L. Assink, R. Hoekstra, J. Sheil and O.O. Versolato
Published in: Phys. Plasmas, 2022, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0129112

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

Author(s): S. Rai, K. Bijlsma, L. Poirier, E. de Wit, L. Assink, A. Lassise, I. Rabadán, L. Méndez, J. Sheil, O.O. Versolato and R. Hoekstra
Published in: Plasma Sources Science and Technology, 2023, ISSN 0963-0252
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6595/acc274

High-energy ions from Nd:YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model

Author(s): D.J. Hemminga, L. Poirier, M.M. Basko, R. Hoekstra, W.M.G. Ubachs, O.O. Versolato and J. Sheil
Published in: Plasma Sources Science and Technology, 2021, ISSN 0963-0252
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6595/ac2224

EUV spectroscopy of Sn 5 + –Sn 10 + ions in an electron beam ion trap and laser-produced plasmas

Author(s): Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, M Bayraktar, J R Crespo López-Urrutia, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics B: Atomic, Molecular and Optical Physics, Issue 53/19, 2020, Page(s) 195001, ISSN 0953-4075
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6455/aba3a8

High-energy parametric oscillator and amplifier pulsed light source at 2-μm

Author(s): L. Behnke, E.J. Salumbides, G. Göritz, Y. Mostafa, D.J. Engels, W.M.G. Ubachs and O.O. Versolato
Published in: Opt. Express, 2023, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/oe.494082

Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma

Author(s): J. Hernandez-Rueda, B. Liu, D.J. Hemminga, Y. Mostafa, R.A. Meijer, D. Kurilovich, M.M. Basko, H. Gelderblom, J. Sheil and O.O. Versolato
Published in: Phys. Rev. Res., 2022, ISSN 2643-1564
Publisher: APS
DOI: 10.1103/physrevresearch.4.013142

Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma

Author(s): J. Scheers, R. Schupp, R. Meijer, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review E, Issue 102/1, 2020, ISSN 2470-0045
Publisher: APS
DOI: 10.1103/physreve.102.013204

Laser-induced vaporization of a stretching sheet of liquid tin

Author(s): Bo Liu, Randy A. Meijer, Javier Hernandez-Rueda, Dmitry Kurilovich, Zeudi Mazzotta, Stefan Witte, Oscar O. Versolato
Published in: Journal of Applied Physics, Issue 129/5, 2021, Page(s) 053302, ISSN 0021-8979
Publisher: American Institute of Physics
DOI: 10.1063/5.0036352

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Author(s): R. Schupp, F. Torretti, R. A. Meijer, M. Bayraktar, J. Sheil, J. Scheers, D. Kurilovich, A. Bayerle, A. A. Schafgans, M. Purvis, K. S. E. Eikema, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Applied Physics Letters, Issue 115/12, 2019, Page(s) 124101, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/1.5117504

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

Author(s): L. Behnke, R. Schupp, Z. Bouza, M. Bayraktar, Z. Mazzotta, R. Meijer, J. Sheil, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Optics Express, Issue 29/3, 2021, Page(s) 4475, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/oe.411539

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Author(s): F. Torretti, J. Sheil, R. Schupp, M. M. Basko, M. Bayraktar, R. A. Meijer, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato, A. J. Neukirch, J. Colgan
Published in: Nature Communications, Issue 11/1, 2020, ISSN 2041-1723
Publisher: Nature Publishing Group
DOI: 10.1038/s41467-020-15678-y

Spectral characterization of an industrial EUV light source for nanolithography

Author(s): F Torretti, F Liu, M Bayraktar, J Scheers, Z Bouza, W Ubachs, R Hoekstra, O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 53/5, 2020, Page(s) 055204, ISSN 0022-3727
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6463/ab56d4

Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

Author(s): Oscar O Versolato
Published in: Plasma Sources Science and Technology, Issue 28/8, 2019, Page(s) 083001, ISSN 1361-6595
Publisher: IOPScience
DOI: 10.1088/1361-6595/ab3302

Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma

Author(s): Y. Mostafa, L. Behnke, D.J. Engels, Z. Bouza, J. Sheil, W.M.G. Ubachs and O.O. Versolato
Published in: Appl. Phys. Lett., 2023, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/5.0174149

Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin

Author(s): Bo Liu, Dmitry Kurilovich, Hanneke Gelderblom, Oscar O. Versolato
Published in: Physical Review Applied, Issue 13/2, 2020, ISSN 2331-7019
Publisher: APS
DOI: 10.1103/physrevapplied.13.024035

Dependence of ion charge-energy emission from Nd:YAG-laser-produced plasma on laser intensity in the 0.4–40×10^10 W/cm2 range

Author(s): L. Poirier, A. Lassise, R. Hoekstra, J. Sheil and O.O. Versolato
Published in: Phys. Plasmas, 2023, ISSN 1070-664X
Publisher: American Institute of Physics
DOI: 10.1063/5.0150883

The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range

Author(s): Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W.M.G. Ubachs, R. Hoekstra, M. Bayraktar and O.O. Versolato
Published in: AIP Advances, 2021, ISSN 2158-3226
Publisher: American Institute of Physics Inc.
DOI: 10.1063/5.0073839

Mass partitioning in fragmenting tin sheets

Author(s): B. Liu, R.A. Meijer, W. Li, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato
Published in: Phys. Rev. Appl., 2023, ISSN 2331-7019
Publisher: APS
DOI: 10.1103/physrevapplied.20.014048

Characterization of 1- and 2 − μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Author(s): R. Schupp, L. Behnke, J. Sheil, Z. Bouza, M. Bayraktar, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review Research, Issue 3/1, 2021, ISSN 2643-1564
Publisher: APS
DOI: 10.1103/physrevresearch.3.013294

Speed of fragments ejected by an expanding liquid tin sheet

Author(s): B. Liu, J. Hernandez-Rueda, H. Gelderblom and O.O. Versolato
Published in: Phys. Rev. Fluids, 2022, ISSN 2469-990X
Publisher: APS
DOI: 10.1103/physrevfluids.7.083601

Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets

Author(s): R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, J Sheil, M Bayraktar, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 54/36, 2021, Page(s) 365103, ISSN 0022-3727
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6463/ac0b70