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Laser-driven plasma sources of extreme ultraviolet light for nanolithography

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Publications

EUV spectroscopy of highly charged Sn 13 + − Sn

Author(s): J. Scheers, C. Shah, A. Ryabtsev, H. Bekker, F. Torretti, J. Sheil, D. A. Czapski, J. C. Berengut, W. Ubachs, J. R. Crespo López-Urrutia, R. Hoekstra, O. O. Versolato
Published in: Physical Review A, Issue 101/6, 2020, ISSN 2469-9926
DOI: 10.1103/physreva.101.062511

EUV spectroscopy of Sn 5 + –Sn 10 + ions in an electron beam ion trap and laser-produced plasmas

Author(s): Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, M Bayraktar, J R Crespo López-Urrutia, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics B: Atomic, Molecular and Optical Physics, Issue 53/19, 2020, Page(s) 195001, ISSN 0953-4075
DOI: 10.1088/1361-6455/aba3a8

Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma

Author(s): J. Scheers, R. Schupp, R. Meijer, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review E, Issue 102/1, 2020, ISSN 2470-0045
DOI: 10.1103/physreve.102.013204

Laser-induced vaporization of a stretching sheet of liquid tin

Author(s): Bo Liu, Randy A. Meijer, Javier Hernandez-Rueda, Dmitry Kurilovich, Zeudi Mazzotta, Stefan Witte, Oscar O. Versolato
Published in: Journal of Applied Physics, Issue 129/5, 2021, Page(s) 053302, ISSN 0021-8979
DOI: 10.1063/5.0036352

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Author(s): R. Schupp, F. Torretti, R. A. Meijer, M. Bayraktar, J. Sheil, J. Scheers, D. Kurilovich, A. Bayerle, A. A. Schafgans, M. Purvis, K. S. E. Eikema, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Applied Physics Letters, Issue 115/12, 2019, Page(s) 124101, ISSN 0003-6951
DOI: 10.1063/1.5117504

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

Author(s): L. Behnke, R. Schupp, Z. Bouza, M. Bayraktar, Z. Mazzotta, R. Meijer, J. Sheil, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Optics Express, Issue 29/3, 2021, Page(s) 4475, ISSN 1094-4087
DOI: 10.1364/oe.411539

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Author(s): F. Torretti, J. Sheil, R. Schupp, M. M. Basko, M. Bayraktar, R. A. Meijer, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato, A. J. Neukirch, J. Colgan
Published in: Nature Communications, Issue 11/1, 2020, ISSN 2041-1723
DOI: 10.1038/s41467-020-15678-y

Spectral characterization of an industrial EUV light source for nanolithography

Author(s): F Torretti, F Liu, M Bayraktar, J Scheers, Z Bouza, W Ubachs, R Hoekstra, O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 53/5, 2020, Page(s) 055204, ISSN 0022-3727
DOI: 10.1088/1361-6463/ab56d4

Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

Author(s): Oscar O Versolato
Published in: Plasma Sources Science and Technology, Issue 28/8, 2019, Page(s) 083001, ISSN 1361-6595
DOI: 10.1088/1361-6595/ab3302

Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin

Author(s): Bo Liu, Dmitry Kurilovich, Hanneke Gelderblom, Oscar O. Versolato
Published in: Physical Review Applied, Issue 13/2, 2020, ISSN 2331-7019
DOI: 10.1103/physrevapplied.13.024035

Characterization of 1- and 2 − μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Author(s): R. Schupp, L. Behnke, J. Sheil, Z. Bouza, M. Bayraktar, W. Ubachs, R. Hoekstra, O. O. Versolato
Published in: Physical Review Research, Issue 3/1, 2021, ISSN 2643-1564
DOI: 10.1103/physrevresearch.3.013294

Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets

Author(s): R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, J Sheil, M Bayraktar, W Ubachs, R Hoekstra, O O Versolato
Published in: Journal of Physics D: Applied Physics, Issue 54/36, 2021, Page(s) 365103, ISSN 0022-3727
DOI: 10.1088/1361-6463/ac0b70