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Content archived on 2024-04-19

Basic Research for Microsystems Integration

Objective

BARMINT aims to design and integrate different functions (sensing, actuating, signal processing) using collective fabrication processes on silicon mono-substrates or using silicon multichip modules, so as to arrive at generic, low cost, efficient, complete microsystems.

APPROACH AND METHODS

To attain these goals, a "common demonstrator for compatibility studies" has been defined which combines all the difficulties already identified in microsystem design and fabrication:

- necessity of a global top-down design for microsystems: multi-technologies, multi-functionalities.
- solving compatibility problems between various technologies : mechanical, optical.
- design (CAD) of the heterogeneous system : analog, digital, interfaces of dissimilar nature : sensors, actuators, power supply.
- 3D assembly and conditioning.

The work will involve the following steps:

- definition of a demonstrator and existing software tools analysis based on technical and economical considerations,
- interdisciplinary design and implementation
- global design process
- identification of specific new design tools
- implementation taking into account compatibility and 3D assembly problems.
- integration and implementation of microsystem demonstrators for medical engineering and microrobotic applications.

POTENTIAL

Practical benefits in three sectors are anticipated:

- "Top-down" design: New integrated tools will be evaluated. These tools will allow the functional simulation of complete microsystems as well as the simulation of special technologies: micromachining, sealing, 3D connection.
- Compatibility of technologies: Processes will be defined in order to obtain compatibility between technologies of different nature such as VLSI, mechanical and optical micromachining, sealing, chemical membranes.
- 3D assembly operations. The project aims to start by using the "CUBIC" process which appears as one of the most promising. Its exact impact and limits for low dimensional and heterogeneous nature assembly will be established.

Programme(s)

Multi-annual funding programmes that define the EU’s priorities for research and innovation.

Topic(s)

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Call for proposal

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Funding Scheme

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Coordinator

Centre National de la Recherche Scientifique (CNRS)
EU contribution
No data
Address
7 avenue du Colonel Roche
31077 Toulouse
France

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Total cost

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Participants (6)

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