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Seeing the invisible: Light-based 3D imaging of opaque nanostructures

Project description

Opening a window into the hidden world of 3D nanostructures

Complex nanostructures play an increasingly important role in society, as they form the basis of the integrated circuits found in modern electronic devices, such as smartphones. But as such structures become smaller and more complex, accurate characterisation of their structure and function becomes challenging. The EU-funded 3D-VIEW project plans to develop imaging techniques that use soft-X-ray radiation produced by ultrafast laser pulses. The result will be 3D images with a resolution well beyond what optical microscopes can achieve, even for structures that are completely opaque to visible light. Project work will also address the lack of compact tools that can look inside 3D nanostructures without damaging the delicate internal structure of metals and semiconductors.

Objective

Nanostructures drive the world around us. Every modern electronic device contains integrated circuits and nano-electronics to provide its functionality. Advances in nanotechnology directly impact society by enabling smartphones, autonomous devices, the internet of things, data storage, and essentially all forms of advanced technology. Fabricating such nanostructures crucially depends on having the tools to make them visible without destroying them. Modern nanodevices often have complex three-dimensional architectures with small features in all dimensions. While imaging methods that achieve nanometer-scale resolution exist, there are currently no compact tools that can look inside 3D nanostructures made out of metals and semiconductors without damaging their delicate internal structure. I will address this challenge by developing compact tools to image 3D nanostructures in a non-invasive way. Even though most nanostructures are completely opaque to visible light, I will develop light-based methods, combined with computational imaging techniques developed in my previous ERC project, to look inside them with unprecedented resolution and contrast. Light-based imaging is unparalleled in speed and versatility, and allows contact-free detection. My proposal is to: 1) Use compact laser-produced soft-X-ray sources to image nanostructures with high 3D resolution and element-sensitive contrast; 2) Use laser-induced ultrasound pulses to image complex 3D nanostructures, even through strongly absorbing materials; 3) Employ computational imaging methods to reconstruct high-resolution 3D object images from the resulting complex diffraction signals. I will forge a coordinated research program to bring these concepts to reality. This program provides exciting prospects for fundamental science and industrial metrology. I will go beyond the state-of-the-art in nano-imaging, to extend our vision into the complex interior of the smallest structures found in science and technology.

Fields of science (EuroSciVoc)

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Keywords

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Programme(s)

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Topic(s)

Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.

Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

ERC-COG - Consolidator Grant

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Call for proposal

Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.

(opens in new window) ERC-2019-COG

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Host institution

TECHNISCHE UNIVERSITEIT DELFT
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 145 986,25
Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

€ 145 986,25

Beneficiaries (2)

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