Periodic Reporting for period 3 - FIBsuperProbes (Focused Ion Beam fabrication of superconducting scanning Probes)
Reporting period: 2022-10-01 to 2025-03-31
The project tackled a fundamental limitation in scanning probe microscopy (SPM): the lack of compact, robust, and highly sensitive magnetic field (and temperature) sensors directly integrated on the tips of cantilevers. Traditional fabrication techniques struggle to realize such devices, ultimately limiting the investigation of quantum and nanoscale physical phenomena in emerging materials such as 2D magnets and superconductors.
Understanding and exploiting emerging materials—like van der Waals heterostructures or topological insulators—holds immense potential for future technologies in sensing, computing, and energy. FIBsuperProbes aimed to enable breakthroughs in the characterization of such materials by delivering new SPM capabilities with unmatched spatial resolution, magnetic/thermal sensitivity, and multifunctionality. These advances are critical for scientific discovery and may drive innovation in the European high-tech sector, with prospective commercialization already underway.
The project’s central goal was to develop a new class of scanning probes by using focused ion beam (FIB) techniques to fabricate superconducting quantum sensors directly on the tips of custom-made cantilevers. The key objectives were:
1. Sensor Development;
2. Proof-of-Concept Experiments;
3. Enable Future Technology.
Despite pandemic-related delays and high technical ambition, the project largely achieved its objectives:
• Technological Achievements:
Developed and demonstrated SQUID-on-lever probes with sub-100 nm resolution, magnetic field sensitivity <0.3 μΦ₀/√Hz, and operation up to 0.5 T at 4.2 K.
Fabricated advanced cantilevers and implemented complex nanofabrication techniques using FIB milling and FEB deposition.
Developed YBCO thin film processes, though integration onto cantilevers was not achieved within the project timeframe.
• Scientific Impact:
Enabled nanoscale imaging of current flow and magnetization in quantum materials.
Produced 17 peer-reviewed publications, with several more in the pipeline.
Contributed to understanding of magnetic textures (e.g. skyrmions, 2D ferromagnetism and antiferromagnetism) and electronic transport in emerging materials.
• Commercialization and Legacy:
Commercialization efforts initiated by consortium members, supported by grants and startup planning.
Demonstrated strong interest from industry partners (e.g. Qnami, Attocube).
Follow-up efforts planned to pursue unresolved milestones, such as YBCO-on-cantilever devices.
Understanding and exploiting emerging materials—like van der Waals heterostructures or topological insulators—holds immense potential for future technologies in sensing, computing, and energy. FIBsuperProbes aimed to enable breakthroughs in the characterization of such materials by delivering new SPM capabilities with unmatched spatial resolution, magnetic/thermal sensitivity, and multifunctionality. These advances are critical for scientific discovery and may drive innovation in the European high-tech sector, with prospective commercialization already underway.
The project’s central goal was to develop a new class of scanning probes by using focused ion beam (FIB) techniques to fabricate superconducting quantum sensors directly on the tips of custom-made cantilevers. The key objectives were:
1. Sensor Development;
2. Proof-of-Concept Experiments;
3. Enable Future Technology.
Despite pandemic-related delays and high technical ambition, the project largely achieved its objectives:
• Technological Achievements:
Developed and demonstrated SQUID-on-lever probes with sub-100 nm resolution, magnetic field sensitivity <0.3 μΦ₀/√Hz, and operation up to 0.5 T at 4.2 K.
Fabricated advanced cantilevers and implemented complex nanofabrication techniques using FIB milling and FEB deposition.
Developed YBCO thin film processes, though integration onto cantilevers was not achieved within the project timeframe.
• Scientific Impact:
Enabled nanoscale imaging of current flow and magnetization in quantum materials.
Produced 17 peer-reviewed publications, with several more in the pipeline.
Contributed to understanding of magnetic textures (e.g. skyrmions, 2D ferromagnetism and antiferromagnetism) and electronic transport in emerging materials.
• Commercialization and Legacy:
Commercialization efforts initiated by consortium members, supported by grants and startup planning.
Demonstrated strong interest from industry partners (e.g. Qnami, Attocube).
Follow-up efforts planned to pursue unresolved milestones, such as YBCO-on-cantilever devices.
Work Performed:
• WP1 designed and fabricated specialized cantilevers with integrated wiring, enabling FIB-based patterning of nanodevices. Efforts to integrate quantum dot-based sensors progressed, though challenges in oxide quality prevented functionality of a scanning single electron transistor (SET) on the cantilever apex.
• WP2 focused on YBCO-based superconducting sensors. Although YBCO SQUIDs on cantilevers could not be realized, a clear path forward via a STO on Si-on-insulator (SOI) substrate was identified.
• WP3 successfully developed superconducting nanoSQUIDs using Pb, Nb, and WC on cantilevers.
• WP4 applied the developed probes to image magnetic textures and current flow in 2D materials.
• WP5 coordinated the project and oversaw dissemination, communication, and exploitation.
Main Results Achieved:
• Successful fabrication of ultra-small, robust SQUID-on-lever probes using FIB, enabling magnetic imaging at the nanoscale with improved spatial resolution, field range, and sensitivity.
• Proof-of-concept magnetic and transport imaging in 2D systems, including electric currents, and domain structures.
• Novel processes developed for FIB-based patterning of nanoSQUIDs from YBCO and Nb.
Exploitation and Dissemination:
• Technology transfer and commercialization efforts are underway, with interest from companies. A commercialization team led by former Ph.D. students has secured post-project funding and is refining a business model.
• Public dissemination included scientific articles, invited talks, press interviews, online content, and contributions to roadmap papers on magnetic microscopy.
• A final workshop showcased the project’s results to industrial and academic stakeholders, promoting future collaborations and uptake of the developed technology.
• WP1 designed and fabricated specialized cantilevers with integrated wiring, enabling FIB-based patterning of nanodevices. Efforts to integrate quantum dot-based sensors progressed, though challenges in oxide quality prevented functionality of a scanning single electron transistor (SET) on the cantilever apex.
• WP2 focused on YBCO-based superconducting sensors. Although YBCO SQUIDs on cantilevers could not be realized, a clear path forward via a STO on Si-on-insulator (SOI) substrate was identified.
• WP3 successfully developed superconducting nanoSQUIDs using Pb, Nb, and WC on cantilevers.
• WP4 applied the developed probes to image magnetic textures and current flow in 2D materials.
• WP5 coordinated the project and oversaw dissemination, communication, and exploitation.
Main Results Achieved:
• Successful fabrication of ultra-small, robust SQUID-on-lever probes using FIB, enabling magnetic imaging at the nanoscale with improved spatial resolution, field range, and sensitivity.
• Proof-of-concept magnetic and transport imaging in 2D systems, including electric currents, and domain structures.
• Novel processes developed for FIB-based patterning of nanoSQUIDs from YBCO and Nb.
Exploitation and Dissemination:
• Technology transfer and commercialization efforts are underway, with interest from companies. A commercialization team led by former Ph.D. students has secured post-project funding and is refining a business model.
• Public dissemination included scientific articles, invited talks, press interviews, online content, and contributions to roadmap papers on magnetic microscopy.
• A final workshop showcased the project’s results to industrial and academic stakeholders, promoting future collaborations and uptake of the developed technology.
Despite impressive results from state-of-the-art scanning superconducting probes, their capabilities and ease of use have been fundamentally limited by the fabrication techniques employed. In particular, integrating a robust stabilization mechanism for tip–sample spacing is non-trivial, which has constrained both spatial resolution and sensitivity, complicated sample navigation, and prevented simultaneous acquisition of topographic contrast. Moreover, the minimum sensor size and functional complexity have been restricted—precluding, for example, the integration of field coils for susceptibility imaging or flux feedback schemes.
The project successfully fabricated ultra-small SQUID-on-lever probes with sub-100 nm spatial resolution, 0.3 μΦ₀/√Hz sensitivity, and robust performance in magnetic fields up to 0.5 T at 4.2 K. The project partners also demonstrated the feasibility of wafer-scale production of cantilevers with integrated superconducting sensors, establishing a reliable and scalable platform for advanced scanning probe devices. Upscaling and commercialization efforts have already begun, supported by post-project grants and a detailed business plan developed by consortium members.
Potential Impacts:
• Scientific and Technological Impact:
The sensors developed within FIBsuperProbes unlock previously inaccessible imaging modes, enabling transformative research in condensed matter physics, quantum materials, and nanotechnology. They pave the way for new methods to study magnetism, dissipation, and superconductivity at the nanoscale—down to individual features such
as domain walls or channels of flowing current. The technology also lays the groundwork for large-scale, reproducible fabrication of advanced scanning probes.
• Socio-Economic Impact:
The global market for scanning probe microscopy is valued at ~500 M EUR/year, with ~150 M EUR attributable to tips alone. By introducing a new class of device-ready cantilevers for direct FIB-fabrication of sensors, FIBsuperProbes opens a promising new market segment. The consortium has already engaged with industrial stakeholders
(e.g. Qnami, Attocube, Quantum Design) and envisions eventual commercialization by larger players such as Zeiss or Raith. The economic potential is significant, though difficult to quantify at this early stage.
• Wider Societal Implications:
The project contributes to maintaining Europe’s leadership in nanoscience instrumentation and quantum technology. It promotes innovation, technical excellence, and cross-sector collaboration. By training a new generation of researchers and entrepreneurs in advanced microscopy and nanofabrication, FIBsuperProbes also strengthens the
European research and innovation ecosystem. This supports long-term societal goals in education, high-tech employment, and scientific sovereignty.
The project successfully fabricated ultra-small SQUID-on-lever probes with sub-100 nm spatial resolution, 0.3 μΦ₀/√Hz sensitivity, and robust performance in magnetic fields up to 0.5 T at 4.2 K. The project partners also demonstrated the feasibility of wafer-scale production of cantilevers with integrated superconducting sensors, establishing a reliable and scalable platform for advanced scanning probe devices. Upscaling and commercialization efforts have already begun, supported by post-project grants and a detailed business plan developed by consortium members.
Potential Impacts:
• Scientific and Technological Impact:
The sensors developed within FIBsuperProbes unlock previously inaccessible imaging modes, enabling transformative research in condensed matter physics, quantum materials, and nanotechnology. They pave the way for new methods to study magnetism, dissipation, and superconductivity at the nanoscale—down to individual features such
as domain walls or channels of flowing current. The technology also lays the groundwork for large-scale, reproducible fabrication of advanced scanning probes.
• Socio-Economic Impact:
The global market for scanning probe microscopy is valued at ~500 M EUR/year, with ~150 M EUR attributable to tips alone. By introducing a new class of device-ready cantilevers for direct FIB-fabrication of sensors, FIBsuperProbes opens a promising new market segment. The consortium has already engaged with industrial stakeholders
(e.g. Qnami, Attocube, Quantum Design) and envisions eventual commercialization by larger players such as Zeiss or Raith. The economic potential is significant, though difficult to quantify at this early stage.
• Wider Societal Implications:
The project contributes to maintaining Europe’s leadership in nanoscience instrumentation and quantum technology. It promotes innovation, technical excellence, and cross-sector collaboration. By training a new generation of researchers and entrepreneurs in advanced microscopy and nanofabrication, FIBsuperProbes also strengthens the
European research and innovation ecosystem. This supports long-term societal goals in education, high-tech employment, and scientific sovereignty.