Despite impressive results from state-of-the-art scanning superconducting probes, their capabilities and ease of use have been fundamentally limited by the fabrication techniques employed. In particular, integrating a robust stabilization mechanism for tip–sample spacing is non-trivial, which has constrained both spatial resolution and sensitivity, complicated sample navigation, and prevented simultaneous acquisition of topographic contrast. Moreover, the minimum sensor size and functional complexity have been restricted—precluding, for example, the integration of field coils for susceptibility imaging or flux feedback schemes.
The project successfully fabricated ultra-small SQUID-on-lever probes with sub-100 nm spatial resolution, 0.3 μΦ₀/√Hz sensitivity, and robust performance in magnetic fields up to 0.5 T at 4.2 K. The project partners also demonstrated the feasibility of wafer-scale production of cantilevers with integrated superconducting sensors, establishing a reliable and scalable platform for advanced scanning probe devices. Upscaling and commercialization efforts have already begun, supported by post-project grants and a detailed business plan developed by consortium members.
Potential Impacts:
• Scientific and Technological Impact:
The sensors developed within FIBsuperProbes unlock previously inaccessible imaging modes, enabling transformative research in condensed matter physics, quantum materials, and nanotechnology. They pave the way for new methods to study magnetism, dissipation, and superconductivity at the nanoscale—down to individual features such
as domain walls or channels of flowing current. The technology also lays the groundwork for large-scale, reproducible fabrication of advanced scanning probes.
• Socio-Economic Impact:
The global market for scanning probe microscopy is valued at ~500 M EUR/year, with ~150 M EUR attributable to tips alone. By introducing a new class of device-ready cantilevers for direct FIB-fabrication of sensors, FIBsuperProbes opens a promising new market segment. The consortium has already engaged with industrial stakeholders
(e.g. Qnami, Attocube, Quantum Design) and envisions eventual commercialization by larger players such as Zeiss or Raith. The economic potential is significant, though difficult to quantify at this early stage.
• Wider Societal Implications:
The project contributes to maintaining Europe’s leadership in nanoscience instrumentation and quantum technology. It promotes innovation, technical excellence, and cross-sector collaboration. By training a new generation of researchers and entrepreneurs in advanced microscopy and nanofabrication, FIBsuperProbes also strengthens the
European research and innovation ecosystem. This supports long-term societal goals in education, high-tech employment, and scientific sovereignty.
