The atomic-layer 3D plotter

Project Information

ATOPLOT

Grant agreement ID: 950785

DOI 10.3030/950785

Project closed

EC signature date 25 March 2020

Start date 1 May 2020

End date 30 April 2022

Funded under

• Horizon 2020 Framework Programme

Total cost € 3 758 308,75

EU contribution € 2 980 675,00

Coordinated by

FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG
Germany

Deliverables

Websites, patent fillings, videos etc. (1)

D6.1

Project website

Publications

Peer reviewed articles (3)

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Author(s): A. Butkutė, L. Jonušauskas
Published in: Micromachines, Issue 12, 2021, Page(s) 499, ISSN 2072-666X
Publisher: Multidisciplinary Digital Publishing Institute (MDPI)
DOI: 10.3390/mi12050499

Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Author(s): A. Butkutė, G. Merkininkaitė, J. Stančikas, T. Baravykas, R. Vargalis, T. Tičkūnas, J. Bachmann, S. Šakirzanovas, V. Sirutkaitis, L. Jonušauskas
Published in: Materials, 2022, Page(s) 2817, ISSN 1996-1944
Publisher: MDPI Open Access Publishing
DOI: 10.3390/ma15082817

Additive manufacturing in atomic layer deposition mode

Author(s): I. Kundrata, M. K. S. Barr, S. Tymek, D. Döhler, B. Hudec, P. Brüner, G. Vanko, M. Precner, T. Yokosawa, E. Spiecker, M. Plakhotnyuk, K. Fröhlich, J. Bachmann*
Published in: Small Methods, 2022, Page(s) 2101546, ISSN 2366-9608
Publisher: Wiley-VCH GmbH
DOI: 10.1002/smtd.202101546

Intellectual Property Rights

Patent (2)

ATOMIC LAYER PROCESS PRINTER

Application/Publication number: 20 20065396
Date: 2020-06-03
Applicant(s): Institute of Electrical Engineering, Slovak Academy of Sciences

ATOMIC LAYER PROCESS PRINTER

Application/Publication number: 20 20065396
Date: 2020-06-03