The atomic-layer 3D plotter

Deliverables

Websites, patent fillings, videos etc. (1)

D6.1

Project website

Publications

Peer reviewed articles (3)

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Author(s): A. Butkutė, L. Jonušauskas
Published in: Micromachines, 12, 2021, Page(s) 499, ISSN 2072-666X
Publisher: Multidisciplinary Digital Publishing Institute (MDPI)
DOI: 10.3390/mi12050499

Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Author(s): A. Butkutė, G. Merkininkaitė, J. Stančikas, T. Baravykas, R. Vargalis, T. Tičkūnas, J. Bachmann, S. Šakirzanovas, V. Sirutkaitis, L. Jonušauskas
Published in: Materials, 2022, Page(s) 2817, ISSN 1996-1944
Publisher: MDPI Open Access Publishing
DOI: 10.3390/ma15082817

Additive manufacturing in atomic layer deposition mode

Author(s): I. Kundrata, M. K. S. Barr, S. Tymek, D. Döhler, B. Hudec, P. Brüner, G. Vanko, M. Precner, T. Yokosawa, E. Spiecker, M. Plakhotnyuk, K. Fröhlich, J. Bachmann*
Published in: Small Methods, 2022, Page(s) 2101546, ISSN 2366-9608
Publisher: Wiley-VCH GmbH
DOI: 10.1002/smtd.202101546