Skip to main content

DEVELOPMENT OF BASIC FABRICATION TECHNOLOGIES AND SIMULATION TOOLS FOR MICROMECHANICAL DEVICES.

Objective

The aim of the project is to further advance the technological and theorical basis if Si micromechanics in order to fully exploit its potential for new applications, thereby creating the foundation for a new industry.
A number of achievements have been obtained:
experiments with dry and wet chemistries show that the required deliverable depths can be obtained;
some microstructures stress compensation techniques have been determined;
development of sensor simulation packages is in progress.
This project set out to investigate specific areas that will contribute to the building blocks necessary for the development of Si based sensors for monitoring pressure acceleration, etc> The project will provide the elements needed for :

1. fabricating micromechanical structures with high aspect ratios and compensated for stress. The experiment will determine the best masking material for etching. Various techniques for the stress compensation in dielectric and semiconductor layers will be studied;

2. developing devices with freely movable silicon parts, which can be used for the realization of micromechanical sensors and actuators;

3. allowing the prediction of the behaviour of micromechanical devices using the software packages and simulations. The state and dynamic behaviour of cantilevers, bridges and plates and he influence of temperature on such structures will be considered.

Coordinator

Schlumberger Industries SA
Address
50 Avenue Jean Jaurès
92542 Montrouge
France

Participants (4)

Chambre de Commerce et d'Industrie de Paris (CCIP)
France
Address
2 Boulevard Blaise Pascal
93162 Noisy-le-grand
Consejo Superior de Investigaciones Cientificas
Spain
Address
Campus Universitat Auto. De Barcelona
08193 Bellaterra
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV (FhG)
Germany
Address
Paul-gerhardt-allee 42
81245 München
Messerschmitt-Bölkow-Blohm GmbH (MBB)
Germany
Address

8000 München