Objective
The project aims at the development of porous silicon layers for use in gas sensor arrays, the BiCMOS-compatible fabrication of these layers and the implementation in a BiCMOS process of a neural network.
The approach will be:
to examine different techniques (such as evaporation, atomic layer epitaxy (ALE), molecular beam epitaxy (MBE) and refined sol-gel) to deposit selective layers onto the porous silicon
to determine, simulate and integrate the optimal neural network for use in conjunction with gas sensor arrays to enhance their selectivity.
The gas transport phenomena determining the behaviour of gas sensor systems will be described with mathematical models, from which a simulation of the system's performance under static and dynamic conditions will be made. The gas sensing system will be integrated in a Micro Total Analysis System (uTAS) for gases.
INFORMATION DISSEMINATION ACTIVITIES AND EXPLOITATION
Information obtained from the project will be presented at conferences and published in scientific journals, and one or more informal workshops will be organised during the project.
Topic(s)
Data not availableCall for proposal
Data not availableFunding Scheme
CSC - Cost-sharing contractsCoordinator
7500 AE Enschede
Netherlands