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Content archived on 2022-12-23

Investigation of Porous Si-Based Structures for Integrated Gas Sensing Applications

Objective

The project aims at the development of porous silicon layers for use in gas sensor arrays, the BiCMOS-compatible fabrication of these layers and the implementation in a BiCMOS process of a neural network.

The approach will be:
to examine different techniques (such as evaporation, atomic layer epitaxy (ALE), molecular beam epitaxy (MBE) and refined sol-gel) to deposit selective layers onto the porous silicon
to determine, simulate and integrate the optimal neural network for use in conjunction with gas sensor arrays to enhance their selectivity.

The gas transport phenomena determining the behaviour of gas sensor systems will be described with mathematical models, from which a simulation of the system's performance under static and dynamic conditions will be made. The gas sensing system will be integrated in a Micro Total Analysis System (uTAS) for gases.

INFORMATION DISSEMINATION ACTIVITIES AND EXPLOITATION

Information obtained from the project will be presented at conferences and published in scientific journals, and one or more informal workshops will be organised during the project.

Topic(s)

Data not available

Call for proposal

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Coordinator

University of Twente
EU contribution
No data
Address

7500 AE Enschede
Netherlands

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Total cost
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Participants (5)