Objective
AIM OF THIS PROJECT IS THE PLASMA DEPOSITION OF PHOTOVOLTAIC GOOD QUALITY AMORPHOUS SILICON FILMS WITH HIGH DEPOSITION RATE.
FOR THIS THE UNDERSTANDING OF THE CHEMICAL PROCESSES OCCURING IN THE PLASMA PHASE AND ON THE GROWTH SURFACE IS CRUCIAL. ACCORDING TO OUR WORKPLAN, A NEW DIODE CONFIGURATION R.F. PLASMA REACTOR HAS BEEN SET UP.
AN IMPORTANT CHARACTERISTIC OF THE PLASMAS GENERATED IN R.F. PARALLEL PLATE REACTOR IS THE PRESENCE OF SHEATH REGION AT BOTH POWERED (CATHODE) AND GROUNDED (ANODE) ELECTRODES. THE OBSERVED ASYMETRY, ALSO IN THE DISTRIBUTION OF THE POTENTIAL OF THE SURFACES WITH RESPECT TO THE PLASMA, GENERATES SPATIAL DISPHOMOGENEITY IN THE PLASMA PHASE; I.E. SPATIAL VARIATION OF ELECTRON TEMPERATURE (KTE) AND DENSITY (NE), AND OF DENSITY OF ALL THE REACTIVE SPECIES PRESENT IN THE PLASMA. WITH THIS RESPECT, THE SPATIALLY RESOLVED DIAGNOSTIC OF THE PLASMA PHASE CAN ASSUME A DETERMINANT ROLE FOR THE MODELLING OF THE PLASMA DEPOSITION SYSTEM. THIS ASPECT HAS BEEN INVESTIGATED IN THE LAST PART OF THE RESEARCH WORK BY UTILIZING OES AND LEP TECHNIQUES WITH SPATIAL RESOLUTION ALONG THE REACTOR AXIS. THIS HAS BEEN DONE BY MOVING THE ELECTRICAL PROBES IN THE ELECTRODE GAP BY MEANS OF AN EXTERNAL MANIPULATOR AND BY SAMPLING THE EMISSION OF A LIMITED PLASMA REGION THROUGH A MOVEABLE APPARATUS.
THE NE AND KTE PROFILES OBTAINED IN SIH4-H2 PLASMA, UNDER TYPICAL CONDITION FOR THE DEPOSITION OF GOOD QUALITY MATERIAL, WELL EVIDENCES THE EXTENT OF THE CATHODE SHEATH, WHICH IS COMPARABLE WITH THE PLASMA VOLUME, AND ARE INDICATIVE OF A STRONG GRADIENT OF ELECTRICAL FIELD BETWEEN THE ELECTRODES. FROM THESE PRELIMINAR RESULTS IT IS WELL EVIDENT THAT THE SPATIALLY RESOLVED DIAGNOSTICS CAN BE FRUITFUL TO DESIGN A MAP OF THE MICROSCOPIC PARAMETERS IN PLASMA REACTOR AND CONSEQUENTLY TO GAIN A DEEPER INSIGHT IN DEPOSITION MODELLING.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology materials engineering amorphous solids amorphous semiconductors
- natural sciences physical sciences plasma physics
- natural sciences chemical sciences inorganic chemistry metalloids
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Data not available
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
70125 BARI
Italy
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.