Objective
Research objectives and content
The continued downscaling of ULSI-devices has placed an emphasis on very precisely controlling device structure and dopant distributions, enforcing the need for metrology tools with nm-resolution. Several concepts based on Atomic Force Microscopy have been proposed to address the electrical characterization and carrier profiling of devices. Their practical implementation as well as application to ULSI-structures is the objective of the present project. Focus of the research will be on establishing the properties of these methods and inter-relating the results to the predictions of process and device simulators.
Training content (objective, benefit and expected impact)
The combination of tool development and applications pursued in this project contributes to the training of the candidate as well as the host institute. The exposure to the demands related with submicron development provides the candidate with a unique opportunity to enhance his knowledge in the field of submicron device technology and physics whereas his vast experience in developing AFM-based tools, will reinforce the scientific base at Imec in this field.
Links with industry / industrial relevance (22)
The industrial needs for 2D-carrier profiling in devices, has placed this item as one of the highest priority themes on the National Technology Roadmap of the Semiconductor Association.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences optics microscopy
- natural sciences physical sciences electromagnetism and electronics semiconductivity
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
3001 HEVERLEE
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.