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Content archived on 2024-05-14

Microfabrication with synchrotron radiation - deep X-ray lithography for industrial use

Fields of science (EuroSciVoc)

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Programme(s)

Topic(s)

Call for proposal

Data not available

Funding Scheme

NET - Research network contracts

Coordinator

Institute of Microtechnology Mainz GmbH
EU contribution
No data
Address
18-20,Carl-Zeiss-Straße
55129 Mainz
Germany
Total cost
No data

Participants (11)