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Microfabrication with synchrotron radiation - deep X-ray lithography for industrial use

Funding Scheme

NET - Research network contracts

Coordinator

Institute of Microtechnology Mainz GmbH
Address
18-20,Carl-zeiss-straße
55129 Mainz
Germany

Participants (11)

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Centre Universitaire Paris Sud - Batiment 209 D
91898 Orsay
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCILS
United Kingdom
Address
Chilton
OX11 0QX Didcot,harwell,chilton
FORSCHUNGSZENTRUM KARLSRUHE GMBH - TECHNIK UND UMWELT
Germany
Address
5,Hermann-von-helmholtz-platz 1
76344 Leopoldshafen
FOUNDATION OF RESEARCH AND TECHNOLOGY - HELLAS
Greece
Address
Vasilika Vouton
71110 Iraklion
Jenoptik GmbH
Germany
Address
1,Carl-zeiss-straße
07743 Jena
Kharkov State Polytechnical University
Ukraine
Address
21,Frunze
310002 Kharkov
Kurchatov Institute of Atomic Energy
Russia
Address
Kurchatov Square
123182 Moskva
LUND UNIVERSITY
Sweden
Address
Paradisgatan 2
221 00 Lund
OXLEY DEVELOPMENTS COMPANY LTD
United Kingdom
Address
St. Thomas Street 35
SE1 9SN London
SINCROTRONE TRIESTE SCPA
Italy
Address
Strada Statale 14, Km Area Science Park
34012 Basovizza
Technische Universität Wien
Austria
Address
27-29,Gusshausstraße
1040 Wien