Objective
- To integrate and evaluate the SD 4000 in a vertical furnace process cell of a high volume 4 Mb, 0.8 micron process line.
- To prove its versatility, accuracy and cost effectiveness for measuring a range of thin, single and multiple films.
- The layers to be evaluated include single layers in the range 4 nm - 1000 nm, multiple layers of ONO, OPO and monitoring of CMP processes.
The assessment of the Plasmos SD 400 ellipsometer is to be carried out in the production environment of SMST. The result will be a benchmark showing best of breed features: precision, measurement capabilities (e.g. interferometer emulation for thin and thick layers, poly-Si, multilayers, multipurpose), throughput, cost-of-ownership.
Fields of science (EuroSciVoc)
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
OIF - Marie Curie actions-Outgoing International Fellowships
Coordinator
71004 Boblingen
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.