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Content archived on 2024-05-27

Piezoelectric array for medical imaging and non destructive control using integrated micromechanical devices.

Objective

This project will use the latest techniques developed for making micro-electromechanical systems in combination with advanced ferroelectric materials to make a new generation of acoustic imaging arrays for medical and NDT ultrasound applications. The project exploits a synthesis of advanced sol gel processes for making thick PZT films at low temperatures, silicon MST technologies (microlithography, wet & dry etching, wafer bonding), design and simulation using finite element and acoustic modelling and advanced optical and electrical test methods. The thick piezoelectric films will be used to actuate a silicon membrane in flexure mode, giving high electromechanical conversion efficiency at resonance and good acoustic matching to water. The all-important problem of piezoelectric film fabrication at low temperature will be addressed using photo-patternable sols and composite powder/sol processing.

Fields of science (EuroSciVoc)

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Programme(s)

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Topic(s)

Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.

Call for proposal

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Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

CSC - Cost-sharing contracts

Coordinator

THALES S.A.
EU contribution
No data
Address
Domaine de Corbeville
91404 ORSAY
France

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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

No data

Participants (6)

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