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Nano-fabrication with focused ion beams

Objective

Controlled and reproducible fabrication of nano-structured materials will constitute one of the main industrial challenges for the next ten years. To overcome severe limitations of existing nano-fabrication techniques, we plan to develop and improve an innovative technology, the Nano-fabrication with Focused Ion Beams (Nano-FIB). This Nano-FIB project will be conducted efficiently thanks to the complementary areas of expertise brought together in our consortium.
Our project is the archetype of future intelligent instruments combining decisive and unique capabilities:
1) Direct and clean nano-patterning processing below the 10 nm range.
2) Self diagnostic and automatic repair capability.
The performances and the economical impact of this technology will be validated through strategic applications.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Address
196 Avenue Henri Ravera
92225 Bagneux
France

Participants (8)

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Rue Jeanne Marvig 29
31055 Toulouse
COMMISSARIAT A L'ENERGIE ATOMIQUE
France
Address
Rue Des Martyrs 17
38054 Grenoble
FUG ELEKTRONIK GMBH
Germany
Address
Florianstrasse 2
83024 Rosenheim
INSTITUTE OF SCIENTIFIC INSTRUMENTS
Czechia
Address
Kralovopolska 147
61264 Brno
RAITH GMBH
Germany
Address
Hauert 18 Technologiepark
44227 Dortmund
UNIVERSITAET DUISBURG-ESSEN
Germany
Address
Universitaetstrasse 2
45117 Essen
UNIVERSITE DE PARIS-SUD XI
France
Address
Batiment 510 Universite Paris Sud
91405 Orsay
UNIVERSITY OF SURREY
United Kingdom
Address

GU2 7XH Guildford