Nano-fabrication with focused ion beams

Objective

Controlled and reproducible fabrication of nano-structured materials will constitute one of the main industrial challenges for the next ten years. To overcome severe limitations of existing nano-fabrication techniques, we plan to develop and improve an innovative technology, the Nano-fabrication with Focused Ion Beams (Nano-FIB). This Nano-FIB project will be conducted efficiently thanks to the complementary areas of expertise brought together in our consortium.
Our project is the archetype of future intelligent instruments combining decisive and unique capabilities:
1) Direct and clean nano-patterning processing below the 10 nm range.
2) Self diagnostic and automatic repair capability.
The performances and the economical impact of this technology will be validated through strategic applications.

Programme(s)

• FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Topic(s)

• 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Address

196 Avenue Henri Ravera
92225 Bagneux
France

Participants (8)

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

France

Address

Rue Jeanne Marvig 29
31055 Toulouse

COMMISSARIAT A L'ENERGIE ATOMIQUE

France

Address

Rue Des Martyrs 17
38054 Grenoble

FUG ELEKTRONIK GMBH

Germany

Address

Florianstrasse 2
83024 Rosenheim

INSTITUTE OF SCIENTIFIC INSTRUMENTS

Czechia

Address

Kralovopolska 147
61264 Brno

RAITH GMBH

Germany

Address

Hauert 18 Technologiepark
44227 Dortmund

UNIVERSITAET DUISBURG-ESSEN

Germany

Address

Universitaetstrasse 2
45117 Essen

UNIVERSITE DE PARIS-SUD XI

France

Address

Batiment 510 Universite Paris Sud
91405 Orsay

UNIVERSITY OF SURREY

United Kingdom

Address

GU2 7XH Guildford