Skip to main content
European Commission logo
English English
CORDIS - EU research results
CORDIS
Content archived on 2024-05-15

Nano-fabrication with focused ion beams

Objective

Controlled and reproducible fabrication of nano-structured materials will constitute one of the main industrial challenges for the next ten years. To overcome severe limitations of existing nano-fabrication techniques, we plan to develop and improve an innovative technology, the Nano-fabrication with Focused Ion Beams (Nano-FIB). This Nano-FIB project will be conducted efficiently thanks to the complementary areas of expertise brought together in our consortium.
Our project is the archetype of future intelligent instruments combining decisive and unique capabilities:
1) Direct and clean nano-patterning processing below the 10 nm range.
2) Self diagnostic and automatic repair capability.
The performances and the economical impact of this technology will be validated through strategic applications.

Keywords

Call for proposal

Data not available

Coordinator

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
EU contribution
No data
Address
196 Avenue Henri Ravera
92225 BAGNEUX
France

See on map

Total cost
No data

Participants (8)