Nano-fabrication with focused ion beams

Objective

Controlled and reproducible fabrication of nano-structured materials will constitute one of the main industrial challenges for the next ten years. To overcome severe limitations of existing nano-fabrication techniques, we plan to develop and improve an innovative technology, the Nano-fabrication with Focused Ion Beams (Nano-FIB). This Nano-FIB project will be conducted efficiently thanks to the complementary areas of expertise brought together in our consortium.
Our project is the archetype of future intelligent instruments combining decisive and unique capabilities:
1) Direct and clean nano-patterning processing below the 10 nm range.
2) Self diagnostic and automatic repair capability.
The performances and the economical impact of this technology will be validated through strategic applications.

Programme(s)

• FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Topic(s)

• 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field

Funding Scheme

Coordinator

Participants (8)