The project will develop an economical, reliable 200/300 mm industrial tool for fabrication of SiGe pseudosubstrates by growing relaxed layers of SiGe on silicon wafers. The project will demonstrate that SiGe-PS can be used for the fabrication of high performant devices for Microelectronics and Optoelectronics (MOSFET's, Electroluminescent diode and Solar cell). These demonstrations: i) open the road to overcome severe bottleneck CMOS technology will face in the next 10/15 years ii) open the road to monolithic integration of GaAs with bulk silicon and fabrication of integrated EL diode for System on Chip applications iii) allow fabrication of cheap large area solar cells. The Consortium gathers together prestigious European laboratories in the fields of SiGe, dep sumicron CMOS technologies, optoelectronics. Project achievements will increase competitiveness of European Technology.
Funding SchemeCSC - Cost-sharing contracts