Objective
The project aims to develop an European Technology to realize high performances customized reaction chambers for Chemical Vapor Deposition (CVD), and metal organics phase vapor systems. Mainly development is dedicated to R&D on the Epitaxy of composed semiconductors, both III-V and II- VI. The final prototype is an integrated instrument, with an epitaxial chamber suitable to work on 2" wafer, also having scale up facility to 3" or 4" , with high lateral uniformity (better than 1 %) for the deposit thickness and stechiometry. This chamber should also have a geometry suitable to a fast switching of the gaseous gas composition for the growth Atomic Layer Epitaxy applications. The prototype development will pay very much attention to the possible customized applications, so that dimensions and technical specifications will allow an easy scale up to every particular CVD process. The target price of the instrument is highly competitive with respect to the existing instruments.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences mathematics pure mathematics geometry
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
00141 ROMA
Italy
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.