Development of techniques for monitoring activated cvd

Objective

Precursor delivery to the novel Activated CVD cannot use conventional approaches. The programme will evaluate and develop appropriate techniques and equipment to monitor and characterize such delivery.

Programme(s)

• FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Topic(s)

• 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field

Funding Scheme

Coordinator