Performance and reliability parameters of nanoscaled materials needs to be measured directly at nanoscale specimens; parameters obtained from macroscopical material testing of bulk specimens cannot be transferred to nanoscale material design. Applications of nanoscale materials up to 300°Care of special interest for development of advanced Microsystems. The project aims to develop a material test techniques and according standards for determination of material behavior and reliability parameters onnanoscaled specimens and components with respect to international and EU-standards. The test device will be based on a digital SEM fro recording surface micrographes in non-regular surface regions of interest (ROI) by means of the corresponding secondary electron signal, combined vacuum in-site radiation heating stage with tensile option for defined position of specimen, micro controller with PC-interface and a software package to control and evaluate the test procedure and for data exchange with reliability simulation software.
Funding SchemeEAW - Exploratory awards