Development of micro-opto-electro-mechanical-systems on CMOS- substrates

Programme(s)

• FP5-HUMAN POTENTIAL - Programme for research, technological development and demonstration on "Improving the human research potential and the socio-economic knowledge base" (1998-2002)

Call for proposal

IHP-MCHD-99-1
See other projects for this call

Coordinator

INSTITUT FUER MIKROELEKTRONISCHE SCHALTUNGEN UND SYSTEME - IMS DUISBURG

Address

Finkenstrasse 61
Duisburg
Germany