A table-top xuv-laser for high-resolution optical lithography

Programme(s)

• FP5-HUMAN POTENTIAL - Programme for research, technological development and demonstration on "Improving the human research potential and the socio-economic knowledge base" (1998-2002)

Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

VRIJE UNIVERSITEIT AMSTERDAM - VERENIGING VOOR CHRISTELIJK WETENSCHAPPELIJK ONDERWIJS

Address

1081,De Boelelaan 1081
1081 HV Amsterdam
Netherlands