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Study of etching of polymers with a large area inductively coupled plasma discharge

Objective

The task of the applicant will be the determination of a process control and end point detection method for Reactive Ion Etching process. The knowledge and the experience that I learn from JRC will benefit my current and future research work. I have an excellent experience in material treatments by plasma and laser radiation, as well as a good theoretical and practical experience in plasma reactors, particularly ECR, which will be helpful for the project as a whole.

The task of the applicant will be the determination of a process control and end point detection method for Reactive Ion Etching process. The knowledge and the experience that I learn from JRC will benefit my current and future research work. I have an excellent experience in material treatments by plasma and laser radiation, as well as a good theoretical and practical experience in plasma reactors, particularly ECR, which will be helpful for the project as a whole.

Topic(s)

Data not available

Call for proposal

1999/C 361/05
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Funding Scheme

Data not available

Coordinator

EUROPEAN COMMISSION JOINT RESEARCH CENTRE