Objective
Micro Electro-Mechanical Systems consisting of microelectronical, micromechanical parts and microsensors are the answer for the global trend for a better energy efficiency, a lower pollution, a faster response time, a wider distribution and an easier access to information and an improvement in social welfare. These systems are expected to have a major impact on the various areas of human activities due to the opportunities offered up by microminiaturization.
The main goal of the project is to develop the moveable components of three-dimensional micromechanical systems based on a further development of new types of materials, electron-beam lithography and mechanical microequipment. The partners have the required starting know-how and experience to carry out succesfully the project. The necessary laboratory equipment for synthesis, modelling and production is available. During this project the technology of three dimensional structuring of organic resistance by electron-beam lithography will be developed.
The Technology for the selective electrochemical deposition of nanocrystalline, amorphous, micro and nano-composite coatings will be worked out. Electro-magnetic modelling of three dimensional moveable microcomponents considering mechanical interactions will be elaborated. Mechanical microequipment and moveable elements of MicroElectroMechanical systems will be demonstrated. The cooperation between European Community and New Independent States countries scientists in framework of this project will be of mutual benefit and lead to major advance of a new high-tech development in MicroElectroMechanical Systems.
Topic(s)
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3001 Leuven
Belgium