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INTEGRATED GAS FLOW AND GAS SENSORS BY USING POROUS SILICON MICROMACHINING

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

Institute of Microelectronics (Imel)
Address

15310 Aghia Paraskevi
Greece

Participants (3)

Ain-Shams University
Egypt
Address

Abbasia
Linkoping Universitat
Sweden
Address
Pelab
58183 Linkoping
UNIVERSITY OF CYPRUS
Cyprus
Address
75,Kallipoleos
1678 Nicosia