INTEGRATED GAS FLOW AND GAS SENSORS BY USING POROUS SILICON MICROMACHINING

Programme(s)

• FP4-INCO - Specific research, technological development and demonstration programme in the field of cooperation with third countries and international organizations, 1994-1998

Topic(s)

• 01020602 - Technologies for components and subsystems

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

Institute of Microelectronics (Imel)

Address

15310 Aghia Paraskevi
Greece

Participants (3)

Ain-Shams University

Egypt

Address

Abbasia

Linkoping Universitat

Sweden

Address

Pelab
58183 Linkoping

UNIVERSITY OF CYPRUS

Cyprus

Address

75,Kallipoleos
1678 Nicosia