The work within the HUNT project will focus on the development and evaluation of the main process modules dedicated to the 100 nm CMOS transistor architecture. Significant improvements in transistor architectures will be required to offer competitive drive currents with the reduced supply voltage envisaged for the 0.13 µm generation and below. Next, the integration of the specific front-end CMOS process modules for the future 100 nm CMOS technology is undertaken. This will take into account the maturity of the modules for industrial use with emphasis on the manufacturability and reliability. This will imply the use of 193 nm optical lithography in the realisation of the ultimate goals of HUNT. Using also results of other European projects as ULTRA II, the expected outcome of HUNT is the integration of a high performance 100 nm CMOS front-end technology for logic applications.
Funding SchemeCSC - Cost-sharing contracts
W1J 6AQ London
5621 JG Eindhoven