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Silicon/Glass Microstructures for innovative Gas Sensing Systems

Objective

GlassGas-II, aims to prospect new methodologies for the fabrication of advanced gas sensing Microsystems of high added value. The project proposes to carry out basic research in complementary fields, such as materials, thermo-mechanical structures, gas analysis characterisation techniques and CMOS electronics integration, in order to implement innovative manufacturing technologies that can improve in the future the competitively of European SMEs and large industries in the gas sensor market and other related fields. GlassGas-II, aims to prospect new methodologies for the fabrication of advanced gas sensing Microsystems of high added value. The project proposes to carry out basic research in complementary fields, such as materials, thermo-mechanical structures, gas analysis characterisation techniques and CMOS electronics integration, in order to implement innovative manufacturing technologies that can improve in the future the competitively of European SMEs and large industries in the gas sensor market and other related fields.

OBJECTIVES
GlassGas-II objective is to develop new materials and technologies for the fabrication of low power semiconductor gas sensors addressing the application competencies of portability, high performance, reliability, endurance, and high yield. The planned methodologies are based on the development of novel thin an thick sensitive materials, thermally isolated structures, and array subsystems and measuring methodologies that can be combined with standard CMOS technology. The devices proposed are based on the combination of glass structures bonded to silicon micro machined substrates to create robust micro-hotplates as the basis of gas sensor devices. Compatible thick and thin sensitive films will be developed that combined with electronics integration will give high added value to the proposal for future smart applications.

DESCRIPTION OF WORK
A work plan for GlassGas-II has been defined that combines technological activities coming from a former assessment phase already finished with new research and development in gas sensing. With the aim of improving not only thermo-mechanical structures for gas sensor micro systems, complementary work packages have been defined dealing with novel ideas and techniques on potentially interesting areas for gas sensors: the development of new sensitive thick and thin materials, advanced parallel and serial array analysis subsystems, new gas measurement methods and electronics integration. In addition relevant applications for fire detection and air ambient control, defined by industrial partners, from their knowledge of the future requirements of the market, will drive the different developments at each stage of the project in order to give full coherence to the work packages. Most of the performances of the structures and technologies developed are of horizontal nature and can be also applied to other fields of applications. It is considered that mechanical robustness, thermal isolation, pre-packaging and testing at wafer level, glass/Si micro structuring, or CMOS integration, are improvements that can also benefit other fields of application of micro systems. Thus, the consortium will study some applications where the developed technologies can be potentially applied with success.
The proposed methodologies of GlassGas II have some inherent risk and require long term research for assessment. However, to ensure good risk management during the project, the partners of the consortium will use, when necessary, more traditional techniques that can facilitate the parallel development and test of different parts of the project before being part of a full demonstrator.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Address
C/ Serrano 117
28006 Madrid
Spain

Participants (4)

CAPTEUR SENSORS & ANALYSERS LIMITED
United Kingdom
Address
2 Columbus Drive, Southwood Business Park
GU14 0NZ Farnborough, Hampshire
DAIMLERCHRYSLER AG
Germany
Address
Epplestrasse 225
70567 Stuttgart
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
Address
Hansastrasse 27C
80686 Muenchen
UNIVERSITY COLLEGE LONDON
United Kingdom
Address
Gower Street
WC1E 6BT London