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Development of an emerging technology based on micropyrotechnic. Applicative Exploration of Energetic Microsystems: MICROPYROSYSTEMS

Objectif

Getting enough force out of a silicon microsystem to deliver a sufficient amount of mechanical work is a challenge. MicroPyroSystems are a new generation of microsystems that could deliver either thrust force or pressure wave within a submillimeter volume of silicon by coupling explosives with silicon chips. MicroPyros is a multidisciplinary basic research project associating research institutions and experts in microsystems, micro technologies, micro mechanical experimentation, as well as in physical and chemical modelling and electronic circuitry. The MicroPyros program is built around 4 main key actions: develop advanced technological tools;
build a design software based on theoretical models;
set up experimental means and demonstrate one concrete application. The motivation behind MicroPyros is to develop generic design technical and technological tools to make MicroPyroSystems work.
Getting enough force out of a silicon microsystem to deliver a sufficient amount of mechanical work is a challenge. MicroPyroSystems are a new generation of microsystems that could deliver either thrust force or pressure wave within a submillimeter volume of silicon by coupling explosives with silicon chips. MicroPyros is a multidisciplinary basic research project associating research institutions and experts in microsystems, micro technologies, micro mechanical experimentation, as well as in physical and chemical modelling and electronic circuitry. The MicroPyros program is built around 4 main key actions: develop advanced technological tools;
build a design software based on theoretical models;
set up experimental means and demonstrate one concrete application. The motivation behind MicroPyros is to develop generic design technical and technological tools to make MicroPyroSystems work.

OBJECTIVES
We will develop a very promising technology that could be implemented in working systems requiring energetic micro actuation. We have chosen to demonstrate MicroPyros through one application: micro propulsion for the space industry. Beyond the micro propulsion demonstrator, MicroPyros could lead to new applications in Medical, Military, Security, etc.
The concrete objectives are:
-Develop advanced technologies to fabricate reliable MicroPyroSystems
-Set up theoretical models and build design tools.
-Develop methods of characterisation for further developments.
-Demonstrate a space application by assembling and testing a micro propulsion module.

DESCRIPTION OF WORK
To achieve MicroPyros objectives, we propose a three-years program based on technological works in parallel to a theoretical program.
The demo phase will:
(1) serve as a guide for the basic research programme,
(2) validate technological and designing tools,
(3) demonstrate the potential of MicroPyros and open new fields of application.
The project is build around 4 main work areas related to the project objectives:
1. Technological developments from the micro fabrication towards the assembling and filling. To get very precise and reliable mechanical performance as well as to enhance the integration scale, we intend to develop advanced technological processes to handle the silicon bulk with extreme precision as well as to assemble each part with high accuracy. An assessment of advanced prototyping equipment (for small volume) will be considered.
2. Theoretical modelling and system simulation. New basic models are necessary to understand and then predict the processes that occur inside the chamber during the combustion as well as to calculate the theoretical performance of the systems. The results of this calculation will serve to build full system design software with a support infrastructure.
3. Experimental tool set-up. The characterisation of Impulse-bit micro force or pressure requires an assessment of the potential technique and set up the best suited. The characterisation tools will serve to validate theoretical models as well as to have expertise tools for further development.
4. Demonstrate the space application. We will fabricate a fully autonomous MicroPyroSystem on the same chip with integrated command circuitry and power supply. This last task will lead to one specific application that will validate the entire program and will open new perspectives for MicroPyrosystems.

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CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
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3, RUE MICHEL-ANGE
75794 PARIS CEDEX 16
France

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