Skip to main content

High Throughput Atomic Layer Chemical Vapour Deposition Batch Equipment using Remote Plasma Enhanced Processing and In-Situ Chamber Clean

Funding Scheme

ACM - Preparatory, accompanying and support measures

Coordinator

INFINEON TECHNOLOGIES AG
Address
St. Martin Strasse 53
81609 Muenchen
Germany

Participants (4)

ASM INTERNATIONAL N.V.
Netherlands
Address
Jan Van Eycklaan 10
3723 BC Bilthoven
AUSTRIAMICROSYSTEMS AG
Austria
Address
Schloss Premstaetten, Tobelbaderstrasse 30
8141 Unterpremstaetten
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
Address
Hansastrasse 27C
80686 Muenchen
MOTOROLA, INC., WILMINGTON
Switzerland
Address
Route De Ferney 207
1218 Le Grand-saconnex