Objective The objectives of the project are the development, manufacture, full characterization and testing of SiO2 on Si specimens with three layer thicknesses with nominal values of 10, 50 and 120 nm, respectively. This should then, if successful, lead to the delivery of SiO2 for the calibration of spectroscopic ellipsometers for the measurement of the thickness of thin films. STATUS In progress. The samples have been produced, characterized and analyzed for stability by IMEC. The measurements of their thickness by means of three distinct techniques, namely: a) Singe Wavelength Ellipsometry (SWE); b) Spectroscopic Ellipsometry (SE); c) Transmission Electron Microscopy (TEM); was then intercompared at different European laboratories. The SE measurements have shown to be the most more accurate and repeatable. The measured samples have been found to be certifiable for the calibration of ellipsometers: IMEC and RSRE will be in charge of the certification phase. Fields of science natural sciencesphysical sciencesopticsmicroscopyelectron microscopyengineering and technologymaterials engineeringcoating and films Programme(s) FP2-BCR 4 - Research and development programme (EEC) in the field of applied metrology and chemical analysis (Community Bureau of Reference - BCR), 1988-1992 Topic(s) Data not available Call for proposal Data not available Funding Scheme CSC - Cost-sharing contracts Coordinator DBP EU contribution No data Address Germany See on map Total cost No data Participants (10) Sort alphabetically Sort by EU Contribution Expand all Collapse all IMEC Belgium EU contribution No data Address See on map Total cost No data Laboratoire d'Électronique Philips France EU contribution No data Address 22 avenue Descartes 94453 Limeil-Brevannes See on map Total cost No data Lamel Italy EU contribution No data Address See on map Total cost No data Philips National Laboratory Netherlands EU contribution No data Address See on map Total cost No data RUCA Belgium EU contribution No data Address See on map Total cost No data Royal Signals and Radar Establishment United Kingdom EU contribution No data Address See on map Total cost No data STC Technology Ltd United Kingdom EU contribution No data Address See on map Total cost No data Siemens AG Germany EU contribution No data Address Otto-Hahn-Ring 6 81739 München See on map Total cost No data Sopra France EU contribution No data Address 68 rue Pierre Joigneaux 92700 Colombes See on map Total cost No data Universidad Complutense Spain EU contribution No data Address See on map Total cost No data