Ultrapure Water Technology - nanoparticle free water for the advanced nanoelectronics industry enabling further miniaturization of electronic devices

Deliverables

Demonstrators, pilots, prototypes (3)

Demonstrator 400 l/h v.02 for evaluation at imec

Final full-scale demonstrator 400l/h

Final full-scale demonstrator 400l/h

Pilot 40 l/h v.01 for evaluation at imec

Open Research Data Pilot (1)

Open Research Data Pilot

Publications

Peer reviewed articles (1)

Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

Author(s): Imtisal-e- Noor, Jan Coenen, Andrew Martin, Olli Dahl, Miriam Åslin
Published in: Journal of Membrane Science, 579, 2019, Page(s) 283-293, ISSN 0376-7388
Publisher: Elsevier BV
DOI: 10.1016/j.memsci.2019.02.067