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Ultrapure Water Technology - nanoparticle free water for the advanced nanoelectronics industry enabling further miniaturization of electronic devices



Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

Author(s): Imtisal-e- Noor, Jan Coenen, Andrew Martin, Olli Dahl, Miriam Åslin
Published in: Journal of Membrane Science, Issue 579, 2019, Page(s) 283-293, ISSN 0376-7388
Publisher: Elsevier BV
DOI: 10.1016/j.memsci.2019.02.067

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